Robotic Transfer Systems

Semiconductor: Wet Etching & Cleaning Solutions RTP(Rapid Thermal Processing). Display: Thermal Process Solutions In-Line Solutions, Inspection Process Solutions. Robotics.

Transfer Module, EFEM, Aligner, LPM, Robot, Intelligent robot

Wafer Transfer Robots, FOUP Handling Robot, Reticle / Mask Handling Robot, Load Port / Loader, Aligners, EFEM (Equipment Front End Module)

EFEM, Atmospheric Robot, Transfer Module, Vacuum Robot

ROBOTS for semiconductor industry. Automation equipment in semiconductor, LCD, OLED, LED.

Hermes CO2 Bubbler, AOI, Metis Magic Water, ESD Nozzle, AGV

Crystal growing furnaces (Si, GaAs, Sapphire) and parts, wafer laser marking machine, wafer handling manipulator, wafer diffusion furnace, thermal process equipment, quartz crucible manufacturing equipment.

Wafer transfer system ( SORTER/EFEM) technology, Standard Mechanical Interface(SMIF) technology, ultra-clean automation/ EUV automation technology, wafer surface curing processes, AGV, wafer ultra-clean automation storage system, and RFID tracking system.

Semiconductor temperature control device series (Chiller), robot series (Wafer Sorter / AMR), local scrubber (Local Scrubber) and other special equipment, is now widely used in semiconductors, LED, LCD and other fields

Industrial robots and components

PCB, Photo Chemical Milling (PCM), Surface Finishing, Thermal Processing Furnaces and Ovens, Automation Equipment. Solar production equipment.

Automation solution for semiconductor, FPD, LED, MEMS. Wafer handling and mask, reticle handling systems.

SEMICONDUCTOR ROBOTS, FLAT PANEL ROBOTS, CUSTOM & SCARA ROBOTS, LOAD PORTS

Semiconductor and electronics handling robots. These robots are built for use in cleanroom applications, including ISO Class 1.

Robotic solutions for semiconductor and electronics industries.

AMR robotic solutions for semiconductor industry.

Bearings for semiconductor industry. Robotic drives and robots for semiconductor production.

Semiconductor and FPD related products: robot, aligner, SMIF opener and handling system, sorter, robotic parts

Semiconductor, LED, PV inspection, testing and sorting solutions. Advance robotic solutions.

Electric Linear Actuator / Electric cylinders / Electric grippers Single-axis Robots with Servo system / Linear motor Robots Cartesian Robots Desktop Robots SCARA Robots AGVS = Automatic Guided Vehicles