Photolithography Processing Equipment

EUV HVM Reflectometer, EUV Accelerated Exposure Tool, Actinic Image Review System (AIRES®), EUV Pellicle Transmission Measurement System, EUV Pellicle High-Speed Mapping Tool, EUV N&K and Phase Measurement Tool, EUV Resist Outgassing Tool

Semiconductor: FOUP Cleaner, POD Cleaner, Wet Station, Chemical Delivery Supply System, Metal Lift Off, Cassette & Magazine Cleaner. Display: OLED Mask Cleaner, Glass Cleaner, Etcher & Stripper, Auto Macro Inspection, Stream-Jet Printing, Lamination M/C,

LCD/OLED In-line Production System. Process equipment: 3D Lamination, Dispenser, Grinder, Bake Oven, Furnace Oven, Micro LED Dispenser.

SREM Scanning Reflection EUV Microscope, Ephase EUV mask phase measurement system, EUVPTR EUV pellicle transmission and reflectance measurement system, EMiLE EUV Micro-interference Lithography Equipment

CMP (Chemical Mechanical Polishing), Wet Cleaning Systems. Display Equipment: Wet Station, APP (Atmospheric Pressure Plasma Cleaner), CO₂Cleaner, Coater & Track System. CMP Slurry and nano dispersion solution

Semiconductor: Wet Etching & Cleaning Solutions RTP(Rapid Thermal Processing). Display: Thermal Process Solutions In-Line Solutions, Inspection Process Solutions. Robotics.

Central Chemical Supply System / Wet System / Inkjet Printing System for semiconductor and display

EVAPORATION SOURCE (Point Source, Linear Source) and VACUUM SYSTEM (OLED System, Sputtering System)

Nanoimprint lithography (NIL) tools, resists, masks, and processes for a variety of NIL including thermal and photo-curable NIL, as well as direct imprinting of materials.

Manufacture Furnaces. Refurbishment and relocation of diffusion furnaces and RTP equipment. Spare parts

Software for simulation and optimization of nanolithography, mask-making, metrology and defect inspection, as well as design and optimization of semiconductor equipment. We also sell SEM functionality extension tools.

Maskless lithography system for 2D and 2.5D digital manufacturing

Maskless photo lithography equipment, Laser de-bonding equipment, inspection and sorting equipment

Ion etching cleaning tools, plasma equipment

Photolithography equipment, Photomask making equipment, Chemistry equipment, Washing and drying equipment for wafers and substrates, Vacuum and plasma equipment, Control, Testing and Measuriung equipment, Solar cell test equipment, Local clean zones.

EB Mask Writer, Mask Inspection System, Epitaxial Reactors

Mask Aligners, UV Exposure Systems, Solar & Photovoltaic, UV Meters, Resistivity Meters

Virtual clean room environment for advanced prototyping and pilot-line production. Spin Coaters, Bake Plates, Spin Developers/Clean, Temporary Bond & Debond.

Advanced Wet Processing Equipment, Silicon Wet Etching Equipment, Wet Benches and Chemical Stations, Chemical Handling Equipment.

Wet process stations, Resist processing equipment, Dicing equipment, PCB processing equipment