Equipment Adapter
Equipment Adapter is a software package for online support of semiconductors, LCD manufacturing equipment, and inspection equipment.
Make your equipment compatible with SEMI compliant equipment easily, quickly and inexpensively.
EDA Adapter
The EDA Adapter makes it easy to build the data collection system needed to improve the yield of SEMI standard and Selete specification equipment.
IoT compatible products: Sigma IoT Gate Way
Software Product Overview
"Sigma IoT Gate Way" is a sensing information collection system that uses 920MHz band wireless communication with excellent power saving / transmission distance / wraparound of radio waves.
It is possible to collect / monitor equipment operation information by retrofitting sensors to existing equipment .
feature
Various sensor connections according to the purpose
・ Data can be collected by retrofitting various sensors without changing the equipment in operation.
・ Compatible with modbus RTU / modbus TCP compatible sensors.
・ Data can be collected regardless of the equipment manufacturer and model.
920MHz band wireless communication suitable for manufacturing sites
・
920MHz band wireless communication with excellent power saving / transmission distance / wraparound of radio waves・ Wiring work is easy because of wireless communication (MSFB configuration does not require wiring work)
External notification function using standard protocol
-Standard failure notification by SMTP (email) / SNMP Trap-
Failure notification by calling an external command to realize your own operation
Image processing technology
Overview
We are developing image processing using the image processing software HALCON (manufactured by MVTec).
In addition, we are certified as a HALCON integration partner of LINX, a domestic distributor .
We will meet the needs of our customers by combining the excellent functions of HALCON with the technology cultivated in our image processing development.
achievement
Wafer edge inspection equipment
Imaging equipment Image processing content
Area camera (2448 x 2048), coaxial lighting, diagonal lighting Wafer edge detection, image cropping, image composition
Wafer surface inspection equipment
Imaging equipment Image processing content
Line camera (16k), line camera lighting,
area camera (2448 x 2048), area camera lighting 16k line imaging with line camera, image size is 16k x 16k
Wafer area detection ⇒ Defect detection in wafer area
Defect type (streak-like defect, foreign matter, scratch)
Image evaluation program
Imaging equipment Image processing content
Area camera (4096 x 2160) Calculates the line profile at the time of imaging and overlays it on the image
Chip board inspection equipment
Imaging equipment Image processing content
Area camera (2448 x 2048), X-ray Target detection, coordinate calculation, settings / results, etc. are overlaid on the image
Wafer chip inspection equipment
Imaging equipment Image processing content
Area camera (2448 x 2048), X-ray Target detection, coordinate calculation, settings / results, etc. are overlaid on the image
Medical device manufacturing line: Imaging inspection process
Imaging equipment Image processing content
Area camera (1600 x 1200), panel lighting, ring lighting Target detection, image cropping, blade surface detection, rubber boundary detection,
edge detection, line edge detection, foreign matter detection, distance measurement
Electronic component inspection
Imaging equipment Image processing content
For captured images Area (electrode, element) detection, threshold inspection, distance measurement
Deep learning classification
Imaging equipment Image processing content
For captured images Creating a
classification model by deep learning from sample images Image classification / judgment using a classification model
