Cameras are essential components for monitoring and controlling semiconductor equipment manufacturing processes. They can be still cameras, charge-coupled device (CCD) cameras, or video cameras, and are used for various purposes such as defect inspection, alignment, and process control. Monitors are used to display the images captured by cameras and help the operators in decision making. Different types of cameras and monitors are used depending on the specific requirements of the manufacturing process. For example, high-speed video cameras are used for monitoring fast processes, while high-resolution CCD cameras are used for detailed inspection. The choice of cameras and monitors also depends on the compatibility with the equipment and the overall system architecture.