Edwards Vacuum LLC

Polycold® systems from Edwards feature patented cryogenic refrigeration technology to provide the highest quality closed-loop Cool Solutions® available in the market today. These state-of-the-art systems are used in applications spanning a broad range of markets—from semiconductors, optical networking, and flat panel displays through detector cooling for aerospace, telescopic and laboratory requirements to web, decorative and ophthalmic coatings.

Cooling Equipment
MaxCool , PFC WATER VAPOR CRYOPUMP
Key Features:

Simple, tube-type cold element (cryocoil or Meissner coil)
Cryocondensation of water vapor in vacuum systems at speeds up to 220,000 L/sec, vacuum levels to 1.5 x 10-9 Torr (2 x 10-9 mbar) depending on model and application
Heat removal to 4000 watts
Very fast pumping speeds
Globally compliant, non-toxic and non-flammable green refrigerant charge
Patented cryogenic refrigeration process and refrigerant mixtures
Ozone Depletion Potential is 0.
PGC GAS CHILLER
Key Features:

Most cost-effective systems available for cooling a gas stream in a low (-75°to -125℃/-103° to -193°F/198 to 148 K) temperature range
Shipped ready to operate for easy installation and maintenance
Cooling to ultra-low temperatures without the cost, risk or inconvenience of liquid nitrogen
Free standing, compact size
Rated for continuous operation
PCC COMPACT COOLERS
Key Features:

Low-vibration heat removal system
Compact size for small footprint
Remote cold end and minimal connections for optimal flexibility
Closed cycle compressor uses patented gas blends and innovative oil management for quiet, reliable performance
Cooling to -203℃
Elimination of the cost, inconvenience and risks of liquid nitrogen

The innovative process of extreme ultraviolet lithography, known in its short form as EUVL or EUV, is the next generation lithography technology that leading semiconductor chipmakers plan to use in the manufacturing of the most advanced semiconductor components. This technology has an historic importance, as it is enabling the continued extension of Moore's Law. The immediate challenge for EUV is the tool uptime. Our fully integrated sub fab solution will bring significant benefits to EUV lithography manufacturing. With over 10 years of enabling EUV from a sub fab perspective our innovative leading technology solutions and systemisation capabilities continue to strive to enable maximum EUV process up-time and yield within a managed safe environment.

EZENITH offers an advanced portfolio of systems providing fully integrated vacuum and exhaust management solutions for all of your semiconductor processes applications. EZENITH systems are unique in offering:

Process-Centric Vacuum & Exhaust Management
Complete Integration of Components
Support of each function with a powerful, Integrated Control Interface
Designed for Efficient use of Space - for Savings of up to 70%
Full Internal Distribution, regulation and monitoring of services reducing utility hook-up by over 60% while ensuring smooth and reliable operation

With just a pump and a gas abatement device, you still are not ready to run your process. You will need to connect the pump exhaust, connect up your line heaters where required, run your water, purge and electrical lines, and then get all of your control signals ready. You will also have to consider double-enclosure, gas leak detection, and how you want to conduct leak checks after your tool maintenance. All of these things will cost you design time and money. We understand the problem so we have developed integrated, process-specific solutions.

Our integrated systems are already pre-designed for most semiconductor processes. The exhaust heaters are set for the correct temperature to minimize cost and maximise up-time. We put leak check ports and gate valves where they are required. The whole system is enclosed and, most importantly, you only need to provide one of each of the required utilities. We distribute the gases, water, electricity, and control signals where they are needed and create a ready-to-go system.

Small Dry Pumps

Industrial Dry Pumps

Chemical Dry Pumps

Semiconductor Dry Pumps

Turbomolecular Pumps

Ultra High Vacuum Pumps

Diffusion Pumps

Oil Sealed Pumps

Vacuum Measurement

Leak Detection

Residual Gas Analysers

Mechanical Booster Pumps