HORIBA’s trusted solutions in fluid control, vaporization, analytical equipment and measuring systems are tailored to every stage of the semiconductor and industrial processing markets. In all stages; from materials evaluation through to final inspection, HORIBA products will help maintain high efficiency and reproducibility in your process.
Our solutions include Mass Flow Controllers for Gas and Liquids, Liquid Vaporizations Systems, Automatic Liquid Refill Systems, Gas Generators, Ultra-Pure Water Monitors and Chemical Concentration Monitors.
Fluid Control
Fluid Control Systems
Dry Process Control
Wet Process Control
Metrology
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