Plasma Sources; Controls; Monitoring; Diagnosis

Plasma Technology, Electromagnetic Shield Technology, Gas Purification Technology, Automation System Technology, Precise Alignment Technology in Vacuum

intelligent sensing platforms for radio-frequency (RF) and plasma process monitoring. Our products find applications in fundamental research, process development, tool design, process control and fault detection and classification (FDC).

Plasma Power Generators, High Voltage Products, Low Voltage Power Supplies, Remote Plasma Sources, Temperature Measurement Products, SCR Power Controllers, Electrostatic Products, Gas Sensors, Artesyn Embedded Power

Thin film equipment and solutions for the vacuum coating industry. Magnetron sputtering sources and plasma power supplies. Targets and backing plates, target bonding service.

semiconductor front-end process equipment

Our products and services include optical emission spectroscopy, end point detectors and plasma monitors, film thickness measurement tools and application S/W used for the process control in semiconductor manufacturing.

NEMS develops plasma technologies and provides plasma surface treatment solutions, including vacuum and atmospheric plasma machines. NEMS plasma machines can be used for surface cleaning surface etching and surface modification

Plasma cleaning, etching and surface treatment equipment.

Modular Thin Film Deposition Systems and Components.

"Lab-to-fab" range of vacuum curing, monolayer coating, wafer and panel bonding and plasma cleaning systems.

Microwave and plasma technology. Microwave generators, plasma systems and components, magnetrons, waveguide components.

Microscopy: TEM, SEM, Ion Beam millling and imaging, ion slicer, electrone probe microanalyzer, Auger microprobe, specrometers, EB lithography system, additive manufacturing,

Vacuum plasma systems, parylene coating systems, 2D graphene CVD systems

EUV and plasma sources, EUV VUV and X-ray metrology equipment, modelling and simulation.

EUV light sources for lithography and optics research and development.

Original equipment manufacturer of plasma etch (reactive ion etch), photoresist strip/ash/descum, and plasma enhanced chemical vapor deposition tools for the compound semiconductor, MEMS, opto-electronic and other markets

Plasma ashing systems and parts

Manufacturer of plasma systems