PRODUCT
HYW
Hastelloy diaphragm pressure sensor for gas delivery systems
Pressure Range：-0.1 or 0 to 0.5, 1, 2, 3.5 20, 25 or 35MPa
Output signal: Current or Voltage, Connection: VCR or UJR selectable
Wetted materials: Hastelloy C-22, 316L Stainless steel
Applications: Gas cylinder cabinet, Valve Manifold Box, Gas Box
CATALOG DRAWING
ARH
Pressure sensor for high temperature fluids for gas delivery systems
High temperature fluid(Max 150℃)
Pressure Range：-0.1 or 0 to 0.5, 1, 2, 3.5 20, 25 or 35MPa
Output signal: Current or Voltage from external amplifier, Connection: VCR or UJR selectable
Wetted materials: Hastelloy C-22, 316L Stainless steel
Applications: Sterilizer, Vaporizer, Supercritical equipment
HYZ
High accuracy pressure sensor for gas delivery systems
Pressure Range：-0.1 or 0 to 0.5, 1, 2, 3.5 20, 25 or 35MPa
Output signal: Current or Voltage, Connection: VCR or UJR selectable
Thermal effect: ±0.05％FS/℃ (within temperature compensation range)
Wetted materials: Hastelloy C-22, 316L Stainless steel
Applications: Gas cylinder cabinet, Valve Manifold Box, Gas Box
CATALOG DRAWING
HYPFZW
Surface mount fitting 316L stainless steel diaphragm pressure sensor for Gas box
Pressure Range：-0.1 or 0 to 0.3, 0.5, 1MPa
Output signal: Current or Voltage, Connection: Surface mount fitting W seal or C seal
Wetted materials: 316L Stainless steel
Applications: Gas box for semiconductor manufacturing equipment
CATALOG DRAWING
HYZFZW
Surface mount fitting Hastelloy diaphragm pressure sensor for Gas box
Corrosive resistance Hastelloy diaphragm
Pressure Range：-0.1 or 0 to 0.5, 1MPa
Output signal: Current or Voltage, Connection: Surface mount fitting C seal or W seal
Wetted materials: Hastelloy C-22, 316L Stainless steel
Applications: Gas Box for Semiconductor manufacturing equipment
SE1000
General purpose vacuum gauge
Monitoring a range of atmospheric to vacuum pressure
Pressure Range：0 to 760, 1000torr
Output signal: Current or Voltage, Connection: VCR or UJR selectable
Wetted materials: 316L Stainless steel
Applications: Loadlok for Vacuum chamber or gas delivery lines
CATALOG DRAWING
SE600／610
Pressure sensor for General industry
Pressure Range: Minimum 50kPa, High pressure maximum 35MPa
Output signal: 1 to 5 VDC, Connection: R1/4"
Wetted materials: SE600: 304 and 630 Stainless steel, SE610: 316L Stainless steel.
Applications: Gas cylinder cabinet, Valve Manifold Box, Gas Box
CATALOG DRAWING
SE700
Pressure sensor for General industry
Pressure Range：-0.1 or 0 to 0.5, 1, 2, 3.5, 20MPa
Output signal: Current or Voltage, Connection: VCR or UJR selectable
Wetted materials: Hastelloy C-22 or 316L Stainless steel, 316 Stainless steel
Applications: Wide applications for oil, gas and corrosive inert chemical fluids.
DRAWING
SE900
Pressure sensor for low pressure measurement
High Corrosion-Resistant Pressure Sensor with Ceramic Diaphragm
Pressure Range：0 to 100kPa *Compound available
Output signal: Current or Voltage, Connection: VCR, UJR, Swagelok selectable
Wetted materials: Ceramic Diaphragm, 316 Stainless steel
Applications: Exhaust air duct, Filter monitoring
CATALOG DRAWING
HYW6220
Pressure sensor with Display, measuring pressure and alarm function as switch
Pressure Range：-0.1 or 0 to 0.5, 1, 2, 3.5 20, 25 or 35MPa
Display digits: ±4 digits (4000 digits selectable within ± 9999)
Output signal: Current or Voltage, Panel size: 35mm x 35mm
Wetted materials: Hastelloy C-22, 316L Stainless steel
Applications: Gas cylinder cabinet, Valve Manifold Box, Gas Box
HYP6700
Pressure sensor with rotatable display, 316L Stainless steel
Measurement pressure and alarm function as switch
Pressure Range：-0.1 or 0 to 0.5, 1MPa
Display digits: Dot-matrix, 4 digits display
Output signal: Current or Voltage, Display unit rotatable, Built-in comparator (Open Collector)
Connection: Surface mount fitting W seal or C seal
Wetted materials: 316L Stainless steel
Applications: Gas Box for Semiconductor manufacturing equipment
CATALOG DRAWING
HYP6801
Compact pressure sensor with Display, 316L Stainless steel
Measurement pressure and alarm function as switch
Pressure Range：-0.1 or 0 to 0.5, 1MPa
Display digits: Dot-matrix, 4 digits display
Output signal: Current or Voltage, Display unit rotatable, Built-in comparator (Open Collector)
Connection: Surface mount fitting W seal or C seal
Wetted materials: 316L Stainless steel
Applications: Gas Box for Semiconductor manufacturing equipment
CATALOG DRAWING
HYZ6700
Pressure sensor with rotatable display, Hastelloy C-22, 316L Stainless steel
Measurement pressure and alarm function as switch
Pressure Range：-0.1 or 0 to 0.5, 1MPa
Display digits: Dot-matrix, 4 digits display
Output signal: Current or Voltage, Display unit rotatable, Built-in comparator (Open Collector)
Connection: Surface mount fitting W seal or C seal
Wetted materials: Hastelloy C-22, 316L Stainless steel
Applications: Gas Box for Semiconductor manufacturing equipment
CATALOG DRAWING
HYZ6801
Compact pressure sensor with display, Hastelloy C-22, 316L Stainless steel
Measurement pressure and alarm function as switch
Pressure Range：-0.1 or 0 to 0.5, 1MPa
Display digits: Dot-matrix, 4 digits display
Output signal: Current or Voltage, Display unit rotatable, Built-in comparator (Open Collector)
Connection: Surface mount fitting W seal or C seal
Wetted materials: Hastelloy C-22, 316L Stainless steel
Applications: Gas Box for Semiconductor manufacturing equipment
HYP-B
Intrinsically Safe Explosion-Proof Construction Pressure Transmitter
Hazardous Location ZONE: 0/1
Pressure Range：-0.1 or 0 to 1, 5, 10 or 20MPa
Output signal: Current or Voltage, Connection: VCR, UJR, Swagelok, PT, PF selectable
Wetted material: Hastelloy C-22(Diagram), 316L Stainless steel(VCR, UJR), 316 Stainless steel(other)
Applications: Gas cylinder cabinet, Valve Manifold Box, Gas Box in Hazardous Location ZONE: 0/1
HYZ-N
Pressure sensor for Non-Incendive construction type
Zone 2, Non-Incendive construction, Type of protection ”n”（ExnAⅡCT5Gc）
Pressure Range：-0.1 or 0 to 0.3, 0.5, 1MPa
Output signal: 4 to 20mA DC, Connection: VCR, UJR, Swagelok, PT, PF selectable
Wetted materials: Hastelloy C-22, 316L Stainless steel(VCR, UJR), 316 Stainless steel(Swagelok, PT, PF)
Applications(Hazardous area):Gas cylinder cabinet, Valve Manifold Box, Gas Box
KS
Pressure sensor for Non-Incendive construction type for low pressure
**Coming soon**
Zone 2, Non-Incendive construction, Type of protection ”n”（ExnAⅡCT5Gc）
Pressure Range：Low pressure 0 to 5kPa
Output signal: 4 to 20mA DC, Connection: VCR, UJR, Swagelok, PT, PF selectable
Wetted materials: Hastelloy C-22, 316L Stainless steel(VCR, UJR), 316 Stainless steel(Swagelok, PT, PF)
Applications(Hazardous area):Gas cylinder cabinet, Valve Manifold Box, Gas Box
PSH-00
Pressure Switch for gas box or chamber
Gauge Pressure Switch
Set Point：1 set point within -0.1 or 0 to 500kPa
Output: PhotoMOS relay
Connection: Surface mount fitting W seal or C seal, VCR
Wetted materials: 316L Stainless steel
Applications: Gas Box for Semiconductor manufacturing equipment
PSH-03
Absolute Pressure Switch for gas box or chamber
Absolute Pressure Switch
Set Point：1 set point within 0 to 1000torr
Output: PhotoMOS relay
Connection: Surface mount fitting W seal or C seal, VCR
Wetted materials: 316L Stainless steel
Applications: Gas Box for Semiconductor manufacturing equipment
SE3000
ALL PFA Pressure sensor for chemicals
Fluid: Chemicals (acid, alkali, solvent), Ultra-pure water
Pressure Range：-0.1 or 0 to 0.3, 0.5, 1MPa
Output signal: Current or Voltage, Connection: Tube, Supper 300, Flared
Wetted materials: PFA
Applications: Chemical delivery system
CATALOG DRAWING
SE4000
PFA Flow Through Pressure Sensor in a single piece design provides reliable pressure measurement in CMP Slurry
Pressure Range：-0.1 or 0 to 0.3, 0.5, 1MPa
Output signal: Current or Voltage, Connection: Tube, Supper 300, Flared
Wetted materials: PFA
Applications: Chemical delivery system for CMP slurry
CATALOG DRAWING
SE4000／6200
PFA Flow Through Pressure Sensor with Display for CMP slurry
Pressure Range：-0.1 or 0 to 0.3, 0.5, 1MPa
Display digits: ±4 digits (4000 digits selectable within ± 9999)
Output signal: Current or Voltage, Panel size: 35mm x 35mm
Connection: Tube, Supper 300, Flared
Wetted materials: PFA
Applications: Chemical delivery system for CMP slurry
CATALOG DRAWING
SE2203
High Corrosion-Resistant Pressure Sensor with Ceramic Diaphragm
Pressure Range：0 to 0.3, 0.5, 1MPa
Output signal: Current, Connection: Tube
Wetted materials: PTFE, Ceramic Diaphragm, Fluororubber
Applications: Delivery system for ammonia
CATALOG DRAWING
SE2201
Low pressure sensor High Corrosion-Resistant Pressure Sensor with Ceramic Diaphragm
Pressure Range：0 to 50, 100kPa
Output signal: Current, Connection: Tube
Wetted materials: PFA Ceramic Diaphragm, Fluororubber
Applications: Exhaust air duct, Chemical tank
ATM300
Automatic Leak Checker
Finish up your piping work just by clicking a start button of ATM-300 leak checker.
Air-tightness is checked by both pressure and temperature sensors to make measuring doubly accurate.
Temperature compensation function by built-in-microprocessor
Measurement pressure range: -0.1 or 0 to 25MPa ※Depend on specification of pressure transmitter
Compatible with current signal output pressure sensor
Maximum 10 channels for simultaneous pressure and 1 channel for temperature measuring
Applications: Gas cylinder cabinet, Pressure vessel
CATALOG DRAWING
NPS1000B
Compact Digital Panel Meter Multifunction display for control panel
Built-in power supply to sensor
Display digits: ±4 digits
Output signal: Current, Voltage,RS-485, Panel size: 35mm x 35mm
Output signal: Current or Voltage
Panel size: 24mm x 48mm
Applications: Control panel for Gas cylinder cabinet
DRAWING SPEC
TDWS61B
Digital Panel Meter for pressure sensor or weight scale
Excellent operability by jog switch
Built-in power supply to sensor
Display digits: ±4 digits
Output signal: Current
Panel size: 48mm x 96mm
Applications: Control panel for Gas cylinder cabinet
SET100
Temperature sensor for gas and chemicals
Wide line-up for various applications
Measuring for specialty gas or liquids inside piping and vessels
Temperature range: up to 100℃ or 200℃
Output signal: Current, PT100Ω
Process connection: VCR
Wetted materials: 316L Stainless steel
Applications: Gas cylinder cabinet
CATALOG
SET102
High Corrosion-Resistant PFA Temperature Sensor
Measuring for chemicals inside piping and vessels
Temperature range: up to 100℃
Output signal: PT100Ω
Process connection: Flared
Wetted materials: PFA
Applications: Chemical delivery system
SETTTC
High Corrosion-Resistant PFA Temperature Sensor by thermocouple type K
Minimum dead space avoids pressure loss
Measuring for chemicals inside piping and vessels
Temperature range: up to 100℃
Output signal: Thermocouple Type K
Process connection: Supper 300, Flared
Wetted materials: PFA
Applications: Chemical delivery system
SEW
High Accuracy Thin Type Load Cell with Built-in 2-wired 4-20mA Circuit
Best solution of monitoring control for liquefied gas
Measurement range: 0 to 50,100,200kgf
Output signal: Current
Size: 200mm up to 420mm
Water-resistant type selectable
Material：304 Stainless steel
Applications: Gas cylinder cabinet
CATALOG
