etchant gases

Precursor materials (including MO source), electronic special gas and photoresists for IC, LCD, LED, OLED, power devices, semiconductor lasers

Our products and services include optical emission spectroscopy, end point detectors and plasma monitors, film thickness measurement tools and application S/W used for the process control in semiconductor manufacturing.

SiC epiwafers, chemicals for etching and deposition gases, PFC and etching gas treatment equipment.