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Graphite Components

Graphite is a commonly used material for process chamber components in the semiconductor industry. Some of the common graphite components used in process chambers include: Electrodes: Graphite electrodes are used as a source of heat in high-temperature processes, such as chemical vapor deposition (CVD) or physical vapor deposition (PVD). They are preferred for their high thermal conductivity and ability to withstand high temperatures without deforming. Showerheads: Graphite showerheads are used to distribute process gases in CVD processes. Graphite showerheads are preferred due to their high resistance to chemical attack and ability to maintain their shape and uniformity at high temperatures. Liners: Graphite liners are used in the process chamber to prevent chemical reactions between the process gases and the chamber walls. They are often used in high-temperature processes due to their high thermal stability and chemical inertness. Wafer carriers: Graphite wafer carriers, also known as boats, are used to transport the substrate in and out of the process chamber. Graphite boats are preferred due to their high thermal stability, which makes them suitable for use in high-temperature processes. Overall, graphite is a commonly used material for process chamber components in the semiconductor industry due to its high thermal conductivity, high thermal stability, and chemical inertness, making it an attractive material for use in various semiconductor manufacturing processes. The choice between using graphite and Pyrolytic Boron Nitride (PBN) components in process chambers in the semiconductor industry depends on the specific requirements of the process being performed. Both materials have unique properties that make them suitable for different applications. Graphite components are preferred in the following cases: High thermal conductivity: Graphite has a high thermal conductivity, which makes it ideal for use as electrodes in high-temperature processes, such as chemical vapor deposition (CVD) or physical vapor deposition (PVD). High-temperature processes: Graphite has a high thermal stability and can withstand high temperatures without deforming, making it suitable for use in high-temperature processes such as annealing. Cost-effectiveness: Compared to PBN, graphite is a more cost-effective material for process chamber components. PBN components are preferred in the following cases: Chemical inertness: PBN has high chemical inertness and is resistant to chemical attack, making it ideal for use as a liner in the process chamber to prevent chemical reactions between the process gases and the chamber walls. High electrical insulation: PBN has high electrical insulation properties, making it suitable for use as a substrate material for growing high-quality epitaxial layers. High thermal stability: PBN has high thermal stability, making it suitable for use in high-temperature processes such as epitaxy growth. In conclusion, the choice between using graphite and PBN components in process chambers in the semiconductor industry depends on the specific requirements of the process being performed and the properties of the materials that are most suitable for the application.

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Sumitomo Electric Co., Ltd

Osaka, JP Manufacturer

Manufacturer of heatspreader materials, high purity powders, components for semiconductor equipment

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Xinte Energy Co., Ltd

, CN Manufacturer

Polysilicon, Silicon nitride, Fumed Silica

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Chengdu ArTech Specialty Graphite Co Ltd

, CN Manufacturer

Graphite machining services

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SEAKI PRECISION CO.,LTD.

, KR Manufacturer

IC L/F QFJ, SOJ, TQFP, LQFP, QFP, TSOP, SSOP, SOP, ZIP, SDIP, DIP, QFN. LED Lead frames. Graphite / Cu+Film.

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SGL Carbon SE

, DE Manufacturer

High-purity graphite components crucial to processes in the semiconductor, LED and solar industry.

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Toyo Tanso Co., Ltd.

, JP Manufacturer

Graphite Products: Isotropic Graphite, C/C composite, Graphite Sheets, Mechanical Carbon, Carbon Brush, Porous Carbon, Surface Treatment

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Tokai Carbon Co., Ltd

, JP Manufacturer

carbon black, graphite electrodes, fine carbon, Smelting and Lining, friction materials, industrial furnaces and related products

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Schunk Xycarb Technology BV

, NL Manufacturer

Graphite, Ceramics and Quartzware solutions for Microelectronic applications

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Zhejiang Harog Technology Co.,Ltd

, CN Manufacturer

Graphite materials and components for semiconductor and electronics.

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Entegris, Inc

, US Manufacturer

Supplier of advanced materials and process solutions for the semiconductor and other high-tech industries.

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PHOSTEC, s.r.o

, SK Manufacturer

High-pressure equipment and technology for the manufacturing of A3B5 phosphide and the development of HT CVD deposition technology (PG, PBN).

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