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Pyrolytic Boron Nitride (PBN)

Pyrolytic Boron Nitride (PBN) is a material commonly used in the production of semiconductors. It has high thermal stability, chemical inertness, and high electrical insulation properties, making it useful as a substrate material for growing high-quality epitaxial layers. PBN is also used as a diffusion barrier in high-temperature processes and as a protective coating in some applications. These properties make PBN an attractive material for semiconductor production and a viable alternative to traditional materials such as silicon dioxide or silicon nitride. In the semiconductor industry, Pyrolytic Boron Nitride (PBN) is used primarily in its bulk form as a substrate material, as well as in thin film form for applications such as diffusion barriers, protective coatings, and dielectric insulators. In substrate form, PBN is often used for growing high-quality epitaxial layers in the production of semiconductors such as gallium nitride (GaN) and silicon carbide (SiC) devices. In thin film form, PBN is deposited on various surfaces to provide insulation, protection, and to prevent the diffusion of impurities. This can be accomplished through various deposition techniques such as chemical vapor deposition (CVD) or physical vapor deposition (PVD). Overall, the use of PBN components in the semiconductor industry is driven by the material's ability to provide high thermal stability, chemical inertness, and high electrical insulation, making it a versatile and useful material in many semiconductor manufacturing processes. Several process chamber components can be made from Pyrolytic Boron Nitride (PBN). These components include: susceptors: PBN is a common material for the construction of susceptors, which are used in high-temperature processes to support and heat the substrate. PBN susceptors have high thermal stability and chemical inertness, making them suitable for use in aggressive process environments. showerheads: Showerheads are used to distribute process gases in chemical vapor deposition (CVD) processes. PBN showerheads are preferred due to their high resistance to chemical attack and ability to maintain their shape and uniformity at high temperatures. liners: PBN liners are used in the process chamber to prevent chemical reactions between the process gases and the chamber walls. They are often used in high-temperature processes due to their high thermal stability and chemical inertness. wafer carriers: Wafer carriers, also known as boats, are used to transport the substrate in and out of the process chamber. PBN boats are preferred due to their high thermal stability, which makes them suitable for use in high-temperature processes.

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Sumitomo Electric Co., Ltd

Osaka, JP Manufacturer

Manufacturer of heatspreader materials, high purity powders, components for semiconductor equipment

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Tokuyama Corporation

, JP Manufacturer

Polycrystalline Silicon, Metallic Boron, Trichlorosilane, Fumed Silica "REOLOSIL", Tetrachlorosilane, High-purity Aluminum Nitride (AlN) Powder and Granules SHAPAL™ Aluminum nitride ceramics, Boron nitride, Photoresist Developer

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PC Technical Ceramics Ltd

, RU Manufacturer

AlN ceramics, Al2O3 ceramics, BeO ceramics and BN ceramics (BN, PBN, HBN)

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NPO Impuls Ltd

, RU Manufacturer, Custom Manufacturer

CVD PBN ceramics, CVD/CVI SiC ceramics and parts

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FLOWSERVE KSM Co., Ltd

, KR Manufacturer

Fine ceramics and Seals: Compressor Seal, Gas Barrier and Containment Seal, Metal Bellows Seal, Mixer Seal, OEM and Special Duty Seal, Pusher Seal, Slurry Seal.

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KeTao Ceramic Co

, CN Manufacturer

Al2O3, PBN, PB, AlN, SiC, Zirconia, GaN ceramic substrates, parts and components.

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PHOSTEC, s.r.o

, SK Manufacturer

High-pressure equipment and technology for the manufacturing of A3B5 phosphide and the development of HT CVD deposition technology (PG, PBN).

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Vital Materials Co., Limited

, CN Manufacturer

Manufacturer of selenium and tellurium products as well as being a key producer of gallium, indium, germanium, bismuth, and cadmium products for diverse end markets and hi-tech applications including semiconductors.

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AXT, Inc

, US Manufacturer

Manufactures and distributes high-performance compound semiconductor substrates

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