Teledyne DALSA is one of the world’s foremost pure-play MEMS foundries. We operate over 41,000 sq ft (3800m2) of clean rooms, 24/7, using both 150mm and 200mm wafers. Our comprehensive MEMS toolbox allows us to manufacture in high volume for a wide range of applications. Together with our sister foundry Teledyne Micralyne we offer decades of MEMS and microfabrication experience across a vas process portfolio.
Across many device types, from micro-mirrors for telecommunication, gyro sensors for game controllers, microfluidic devices for miniaturized medical systems, automotive pressure and inertial sensors for automobiles or microphones for smartphones, Teledyne DALSA has delivered high volume MEMS production for innovations that reduce both size and power consumption even as they increase performance.
We are ISO/TS 16949 and ISO 14001 registered and RoHS compliant, well equipped and experienced to meet the demanding requirements of customers that serve all the main MEMS markets including consumer, automotive, industrial and biotech/medical.
Some of the MEMS manufacturing capabilities we offer:
0.35 µm capable lithography
High Q-factor wafer encapsulation
High-aspect deep reactive-ion etching (DRIE)
Piezo electric materials
In-situ doped polysilicon
Low stress Silicon nitride
Anhydrous HF release
Photo definable thick polymer