Nanolithography Systems
Select the nanolithography system that best fits your needs - we offer the broadest range of nanofabrication instrumentation
Raith’s broad nanofabrication portfolio offers the ideal solution for all your nanofabrication challenges. Whether you are seeking an electron beam nanolithography system for industrial work or academic applications, want to configure your FIB-SEM with a selection of ions for FIB nanopatterning, or already have an SEM / FIB-SEM and are looking for a way to expand its use to include nanofabrication, Raith has the optimal solution for you. Employing a variety of workflows, Raith systems deliver the outstanding data quality required for large-area mosaic image acquisition, automated metrology, and process control. Whenever nanostructures need to be created or observed, find out what Raith’s nanofabrication, imaging, and lithography systems can do for you to get the very best out of your applications. Team up with Raith for a lifelong partnership in nanofabrication.
Solutions for
Electron Beam Lithography
FIB-SEM Nanofabrication
Large Area SEM Imaging
Nanolithography Upgrades
Photo of the high resolution lithography system EBPG Plus
Electron Beam Lithography Systems
Electron beam lithography systems are Raith’s core business. Our wide–ranging portfolio of products, covering everything from fully automated high–resolution systems to multifunctional tools, can supply you with the ideal EBL system to cater to your needs.
FIB-SEM Nanofabrication Systems
Raith’s unique FIB-SEM system defines FIB as the priority technique. Supported by a field emission SEM and Raith´s unique Laser Interferometer Stage, the FIB-SEM nanolithograhy system fulfills the most demanding requirements in R&D nano prototyping as well as sample preparation and microscopy.
Photo of the FIB-SEM VELION
Photo of the SEM solution CHIPSCANNER
Large Area SEM Imaging
Efficient, fully automated nanometrology and process control combined with Raith’s high-precision Laser Interferometer Stages are the foundation of the Raith scanning electron microscope solution for accurate large-area image acquisition.While it is especially valuable for reverse engineering applications, it is beneficial for any application that requires nm resolution over cm² and excellent layer-to-layer 3D accuracy for reconstruction.
Nanolithography Upgrade Kits
Our nanolithography upgrade kits offer the easiest and most cost-effective access to professional nanolithography and nanofabrication. Simply combine the kit with an existing SEM, FIB, FIB-SEM or HIM for use as a nanolithography system.
