Changzhou Ruize Microelectronics Technology Co., Ltd. ( REC) was established in 2008 and is located in Sanjing Industrial Park, a national incubator in Changzhou National High-tech Zone. The enterprise is a high-tech enterprise in Jiangsu Province integrating scientific research, production and sales.
REC's main business includes wet process equipment required for the manufacture of integrated circuit photomasks and components required for various wet process equipment in the field of large semiconductors.
REC has an anti-static clean room (divided into: high-purity component processing area, single function test area, component storage area and overall equipment assembly test area, the assembly test area can accommodate five sets of equipment for assembly and testing at the same time), processing area (with numerical control Lathes, CNC milling machines, liquid particle detectors, gas particle detectors, ultrasonic cleaning equipment, complete sets of professional assembly tools, hydraulic lifting equipment, digital machining centers, etc.), dust-free processing areas and administrative office areas. REC's technical team covers process, mechanical design, machining, electrical design and software design, and has a complete after-sales service system.
In November 2008, REC independently developed "130-nanometer photomask cleaning equipment", and completed the debugging in April 2009 and entered the production line of Wuxi China Resources Microelectronics Mask Factory. This equipment breaks the foreign monopoly and fills the gap in this field in China. The technical indicators of the tested equipment have reached the international leading level, and some technical indicators even exceed the international leading level. The equipment has been successively rated as "Jiangsu Province's First (Set) Major Equipment Product", " High-tech Product " , "Jiangsu Top Ten Innovative Products", and " City Top Ten Model Workers Innovation Achievement Award " .
There are now a number of photomask wet process equipment in SMIC Integrated Circuit Manufacturing (Shanghai) Co., Ltd., Wuxi China Resources Microelectronics Co., Ltd., University of Science and Technology of China, Changsha Shaoguang Mingban Co., Ltd., and Shenzhen Qingyi Optoelectronics Co., Ltd. Co., Ltd. and other important domestic integrated circuit manufacturing enterprises and other production lines used in the production line , and received unanimous praise.
Through the joint efforts of team members, REC has developed rapidly. It has successively undertaken major national science and technology special projects (02 special projects), international cooperation projects of the Ministry of Science and Technology of the People's Republic of China, SME Innovation Fund Project of the Ministry of Science and Technology, Jiangsu Province SME Innovation Fund Project, Jiangsu Province International cooperation projects, etc., are dedicated to the research and development and industrialized manufacturing of advanced photomask wet process equipment.
At present, REC has reached cooperation with a number of domestic and foreign enterprises and institutions such as the Institute of Microelectronics of the Chinese Academy of Sciences, SMIC, China Resources Microelectronics Mask Factory, South Korea's Hynix, and Israel's CI-SEMI to jointly research and develop photomask cleaning. New process equipment and equipment for micro-nano processing technology.
REC hopes that through close cooperation with customers and technological innovation, according to the actual needs of customers, combined with its own advantages, to achieve greater development in related fields, greatly improve the cost-effectiveness of equipment, become a solid backing for customer development, and serve as a large semiconductor in my country. The vigorous development of the cause adds to the glory.
RP series perfluorinated pump (perfluorinated pump, air bag pump, chemical pump, bellows pump, strong acid
CIS series CO2 foaming machine (carbon dioxide foaming machine, carbon dioxide foaming machine, de-static dioxide
PMX2000 series photomask processing equipment
PMX1500 Series Photomask Processing Equipment
In-Line Infrared Heater