Sterilizing equipment is used in the semiconductor fabrication process to remove any contaminants, such as bacteria or other microorganisms, from surfaces and tools. This is important to prevent contamination that could affect the quality and performance of the final product. Sterilization can be achieved through various methods, including the use of high-temperature heat, chemicals, or radiation. Some common sterilizing equipment includes autoclaves, chemical sterilizers, and ultraviolet (UV) light sterilizers.