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AMHS and Components

AMHS (Automated Material Handling Systems) for a Semiconductor Fab is a system that helps in the handling and transportation of wafers and other equipment within a fab environment. OHT (Overhead Transfer), OHS (Overhead Shuttle), AGV (Automated Guided Vehicle), RGV (Robotic Guided Vehicle), Carrier Stocker, Tool Front FOUP (Front Opening Unified Pod) Buffer, and Wafer N2 Purging are some of the components and systems used in an AMHS. These systems ensure the efficient and safe transportation of wafers and equipment, reducing the risk of contamination and improving productivity in the fab.

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AVACO Co Ltd

, KR Manufacturer

Sputtering System, OLED System, Solar Module System, AMHS, AS/RS, 3D Printer, Converting Machine

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Murata Machinery, Ltd

, JP Manufacturer

Automated storage and retrieval system (AS/RS) Shuttle system Uni-SHUTTLE HP 3D robot warehousing system ALPHABOT Smart AGV Premex XIO Automated forklift Premex SLX Self-driving carriage-mounted Automated forklift Premex SLX with SVS AGV (automated guided

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Shanghai Fortrend Technology Co., Ltd

, CN Manufacturer

Wafer transfer system ( SORTER/EFEM) technology, Standard Mechanical Interface(SMIF) technology, ultra-clean automation/ EUV automation technology, wafer surface curing processes, AGV, wafer ultra-clean automation storage system, and RFID tracking system.

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