TSI, international leader in measurement technology for nearly 60 years and recognized leader in high-sensitivity particle counting, offers a range of instruments to reduce risk during fab processing by detecting sub-micron and nanoparticles that contaminate products in semiconductor manufacturing.
Minimize your risk, easily pass audits, and reduce product waste with new TSI AeroTrak®+ Remote Airborne Particle Counters—top-choice for uninterrupted, reliable particle counting during semiconductor or electronics manufacturing. Covered by an industry-exclusive 5-year laser warranty.
TSI also offers other high-sensitivity particle counting instruments. TSI 0.1 µm airborne particle counters and 10 nm cleanroom condensation particle counters are designed to meet the critical needs of the semiconductor industry by providing complete contamination detection ≥10 nm. TSI FMS Software with OPC UA Client/Server functionality makes it easy to exchange data to continuously monitor semi manufacturing cleanrooms—and pass audits.
In addition, MSP, a division of TSI, provides solutions for liquid source vaporization and calibration standards for defect inspection and metrology for semi manufacturing.
FILTER TESTING
Filters are used in air cleaners and air purifiers, ventilation systems, hospitals, and labs.
CONTAMINATION
CONTAMINATION CONTROL
Solutions for pharmaceutical, semiconductor, electronics, and industrial manufacturing.
GAS FLOW
GAS FLOW MEASUREMENT
Accurate flow meters with wide dynamic range and fast response, for better product testing.
SEMI VAPOR
SEMICONDUCTOR VAPORIZATION
Liquid source vaporization is a critical component in semiconductor fabrication, such as CVD/ALD.
SURFACE DEFECTS
INDUSTRIAL THIN FILMS VAPORIZATION
Thin film deposition processes are used to create protective coatings in industrial applications.
SURFACE DEFECTS
CALIBRATE SURFACE DEFECT INSPECTION
Surface defect inspection systems need regular calibration to ensure accuracy and prevent defects.
