Gas Scrubber

Plasma Technology, Electromagnetic Shield Technology, Gas Purification Technology, Automation System Technology, Precise Alignment Technology in Vacuum

POU Abatement System, RTO (Regenerative Thermal Oxidizer), IES (Ion Exchange System)

Abatement and Liquid Delivery System

CHILLER, HEAT EXCHANGER, SCRUBBER, TEST CHAMBER. RETAINER RINGS and OTHER PROCESSING PARTS

Scrubbers for exhaust gases, chillers to control the processing temperature on the Fab equipment

Gas Cabinets, Gas Abatement Systems, Process Containers

nitrogen and electronics material gases as well as total solutions including related equipment in the global electronics sector.

Waste gas treatment, Wastewater treatment, Cleanroom technology

Semiconductor temperature control device series (Chiller), robot series (Wafer Sorter / AMR), local scrubber (Local Scrubber) and other special equipment, is now widely used in semiconductors, LED, LCD and other fields

gas abatement systems in a series of scrubber-dry wet, thermal wet and burn types.

Plating Process solutions, ​Gas Abatement Systems, ​Deaeration Systems, ​Wet Process Tools, ​Process Support & Consulting ​

Engineering solutions for ultra high purity (UHP) gases and chemicals. BULK GAS DELIVERY SYSTEM, SPECIAL GAS DELIVERY SYSTEM, GAS DETECTION & SCADA, FACILITIES HOOK UP, EXHAUST SYSTEM

Abatement System, Deodorization and VOC treatment equipment, Dehumidifier.

Total gas/chemical supplying systems and engineerings that support the semiconductor and FPD industries.

supply of semiconductor raw material and equipment, which includes Wafer Sense, Mass Flow Controller, gas purifier and scrubber, etc

Scrubber, chiller, vacuum/pipe.

Gas Supply, monitoring and purification systems. Precursor supply system. Piping.

Gas abatement systems

High purity and gas phase filters and equipment for clean rooms.

Gas plants