Scrubber

Scrubbers for exhaust gases, chillers to control the processing temperature on the Fab equipment

Wet process equipment, scrubber, cleaning/drying equipment, quartz products

Semiconductor temperature control device series (Chiller), robot series (Wafer Sorter / AMR), local scrubber (Local Scrubber) and other special equipment, is now widely used in semiconductors, LED, LCD and other fields

gas abatement systems in a series of scrubber-dry wet, thermal wet and burn types.

Abatement System, Deodorization and VOC treatment equipment, Dehumidifier.

supply of semiconductor raw material and equipment, which includes Wafer Sense, Mass Flow Controller, gas purifier and scrubber, etc

Scrubber, chiller, vacuum/pipe.

Wet processing technology and products for the semiconductor and wafer level packaging (WLP) industries.

Front end wafer fabrication equipment. Developer, Coater, Scrubber, Stripper, Etcher.

Development and production of advanced products for cleaning, resist coating, developing, annealing and other surface processing systems, as well as products for the new 200 mm and 300mm wafer market.