CLUSTER SPUTTER(CREJU)
CREJU Series is equipment that operates vapor deposition by the sputtering method in which the material or oxide are sputtered in the vacuum condition to the large-size substrate. The display is handled by vacuum robot
TYPE
Horizontal-Pass,
Vertical-Depo. Type
FEATURE
Ability to form Multi Layer
UNIQUE FEATURE
Elaborately move the Magnet in Cathode
and thereby improve the quality of the film
and maximize the target efficiency
EFFICIENCY
Substrate Size 2G, 3.5G, 4.5G, 5.5G, 6G [0.3~0.7t]
Deposition Material ITO, Al, Mo, Ag, Ti, IGZO
Equipment Composition LUM + TRM + PRM
Power Source Type DC, Pulsed DC
Cathode type Planar, Rotary
Application TFT-LCD, LTPS_OLED, OLED, Oxide TFT
IN-LINE SPUTTER(IVIC)
IVIC Series is equipment that mainly used for the production of Flat Panel Display
The equipment operates vapor deposition in which the metal material or oxide are sputtered in the vacuum condition to the large-size substrate in either when the substrate is halted or moving. The substrate is handled by a Carrier
TYPE
Vertical-Pass, Vertical-Depo. Type
FEATURE
Transfer particle control
EFFICIENCY
Substrate Size 6G, 8G [0.4~0.7t]
Deposition Material ITO, Al, Mo, Ag, Ti, IGZO
Equipment Composition GTM + LUM + HM + PRM
Power Source Type DC, Pulsed DC
Cathode type Planar, Rotary
Application LTPS_OLED, OLED, LCD/Oxide TFT
