Founded in 2002, Shanghai Micro Electronics Equipment (Group) Co., Ltd. (SMEE) is dedicated to the research, design, manufacturing, sales and technical services of semiconductor equipments, pan-semiconductor equipments and high-end intelligent equipments for IC front-end, advanced packaging, FPD panels, MEMS, LED and power devices.
SMEE is committed to manufacturing high-end quality products, creating remarkable value and providing all-round technical services wholeheartedly.
Based on the ISO 27001, ISO 9001 and ISO 14001, SMEE seeks to provide customers with sustained, stable and superior products and services, and also fulfills social responsibility as an excellent high-tech corporate.
SMEE has been certified by GB/T29490-2013 "Enterprise intellectual property management", and been rated as an Exemplary Enterprise of Patent and IPR Work in Shanghai, National Exemplary Enterprise of Intellectual Property Rights and National Enterprise Technology Center.
IC Area
IC Front-end Manufacturing
600 Series Scanner
IC Back-end Advanced Packaging
500 Series Stepper
Wafer Optical Inspection
Wafer Automatic Optical Inspection Equipment
Wafer Box/ FOUP Transporter / Handler
Material Transport Robot for IC Fab
IC Back-end Manufacturing
Wafer Aligner / Bonder
Stripping Photo-resist on the Silicon Wafer Edge
Wafer Edge Exposure Equipment
FPD Area
TFT Exposure
200 Series Scanner
AM-OLED Encapsulation
Laser Sealing Equipment
LCD Cell Process
Photo Alignment Equipment
Total Pitch/ Center Shift Measurement
Measurement Equipment
AM-OLED Tension
STW260 Tension Tool
AM-OLED FMM Mask Measurement
FMM Mask PPA Measurement Tool
LED/ MEMS/ Power Devices
LED/ MEMS/ Power Devices
300 Series Stepper
IGBT Backside Annealing Process
Laser Annealing Equipment
MEMS Manufacturing
Wafer Aligner / Bonder
Lithography
IC Front-end Manufacturing
600 Series Scanner
IC Back-end Advanced Packaging
500 Series Stepper
LED/ MEMS/ Power Devices
300 Series Stepper
TFT Exposure
200 Series Scanner
Laser and Inspection
IGBT Backside Annealing Process
Laser Annealing Equipment
AM-OLED Encapsulation
Laser Sealing Equipment
LCD Cell Process
Photo Alignment Equipment
Total Pitch/ Center Shift Measurement
Measurement Equipment
Wafer Optical Inspection
Wafer Automatic Optical Inspection Equipment
Special Applications
IC Back-end/ MEMS Manufacturing
Wafer Aligner / Bonder
Wafer Box/ FOUP Transporter / Handler
Material Transport Robot for IC Fab
Stripping Photo-resist on the Silicon Wafer Edge
Wafer Edge Exposure Equipment
