mechatronic systemtechnik has a wide product range with perfectly coordinated individual units so that every customer can achieve the ideal solution to its needs – with-out compromise.
Convince yourself of the professionalism of our Products:
Integrated OEM Tools
Wafer Handling Tool-EFEM (mWL series)
Loading of wafer or frames from cassette/Foup to chuck and returnRead more...
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FOUP Loader (mFL Series)
Loading of dummy wafers to Foup and loading Foup to inspection tool and returnRead more...
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Stand Alone Tools
Wafer Packer (mPT series)
Packing and unpacking of wafers/frames to/from shipping boxes to/from cassettes or FOUPsRead more...
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Wafer Sorter (mWS series)
Sorting, splitting and merging of wafers/frames.Read more...
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Ring Remover (mRR series)
Removal of ring from frameRead more...
