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Wafer Steppers

Wafer steppers are photolithography tools used in the manufacture of microelectronic devices. They are used to transfer patterns onto silicon wafers during the photolithography process. A wafer stepper operates by projecting an image of a photomask onto the surface of a silicon wafer using a lens system. The photomask contains the desired pattern that will be transferred onto the wafer. The wafer is positioned on a stage and is moved in small increments, or ""steps,"" relative to the photomask. This allows the pattern to be transferred onto the entire surface of the wafer. Wafer steppers are capable of high precision and accuracy, with resolutions down to a few nanometers. They are widely used in the microelectronics industry for the manufacture of integrated circuits, MEMS devices, and other microelectronic devices. There are two main types of wafer steppers: step-and-repeat steppers and scan steppers. Step-and-repeat steppers are used for simple, repetitive patterns, while scan steppers are used for more complex patterns that require continuous scanning of the wafer. The specific type of wafer stepper used will depend on the desired pattern and the type of microelectronic device being produced.

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Neutronix Quintel Inc, NxQ

, US Manufacturer

mask aligner and photolithography specialists providing custom-engineered contact/proximity mask aligners.

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Onto Innovation

, US Manufacturer

Advanced Process Control and Yield Management Software. Defect Inspection and Metrology Systems. Epi Thickness & Composition. Lithography Systems.

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Ushio, Inc.

, JP Manufacturer, Custom Manufacturer

Light sources and light units (LED, laser, lamp). Lithography tools and aligners. UV curing systems.

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Nikon Corporation

, JP Manufacturer

Lithography equipment for semiconductor and FPD.

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Canon Inc.

, JP Manufacturer

Lithography equipment for semiconductor and FPD.

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Shanghai Micro Electronics Equipment Co., Ltd, SMEE

, CN Manufacturer

Front end and packaging equipment for IC, FPD, MEMS and LED.

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