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High Current Ion Implanter

A High Current Ion Implanter is a type of equipment used in semiconductor manufacturing for doping the substrate (usually silicon) with ions (impurities) to create the desired electrical properties in the material. The process involves bombarding the substrate with a high current beam of ions to implant them into the material. The ion implanter uses an ion source, typically an electron cyclotron resonance (ECR) or radio-frequency (RF) plasma source, to produce ions of the desired species. The ions are then accelerated by an electrical field and directed onto the substrate. The substrate is typically held in a sample holder and is positioned inside a vacuum chamber for the ion implantation process. The parameters of the ion implantation process, such as the energy, dose, and species of ions, are carefully controlled to achieve the desired electrical properties of the material. The high current ion implanter is an important tool in the semiconductor manufacturing process as it enables precise control over the doping of the substrate material, which is critical to the performance of the final device.

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Sumitomo Heavy Industries Ion Technology Co., Ltd

, JP Manufacturer

Ion implanter

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SHELLBACK Semiconductor Technology

, US Distributor, Manufacturers' Rep

Semitool Wet Chemical Process Tools, Varian ion implant systems, track solutions and wafer carrier inspection equipment for the semiconductor, TFH, CPV, MEMS, LED, III/V markets

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China Electronic Technology Group Corporation (CETC-E)

, CN Manufacturer

Ion implanter family from medium current, high current and high energy implanters, to implanters for special applications and third-generation semiconductors for 28-nanometer manufacturing process. Solar manufacturing equipment.

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ion beam services S.A., IBS

, FR Manufacturer

Ion implantation equipment and ion implantation services. Equipment service and upgrade, spare parts supply.

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ULVAC, Inc

, JP Manufacturer

Vacuum equipment, peripheral devices, vacuum components and materials for the display, solar cell, semiconductor, electronics.

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Kingstone Semiconductor

, CN Manufacturer

Ion implantation equipment

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Axcelis Technologies

, US Manufacturer

Innovative Ion Source Technology, Ion Implanters

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