Ashing Equipment

Ion etching cleaning tools, plasma equipment

Coaters, Developers, Scrubbers, TSV Cu and Au plating equipment

Vacuum pumps & components, Thin film forming equipment, Hard film forming equipment, Plasma processing equipment, Soldering equipment, Vacuum heat treatment equipment, Optical inspection equipment

Vacuum gate valve, plasma cleaning system, Etching & Ashing system and gas purifier & PSA system in semiconductor and FPD industry.

Laboratory and industrial furnaces and ovens.

Manufacturer of RTP tool. Distrubutor of sputter, ahser, etch and metrology systems.

Wafer Fabrication Equipment: Dry strip, dry cleaning, new hard mask strip system, edge clean system. 3D IC Packaging Equipment: plasma surface treatment, reflow system, hot DI system, plasma source

Vacuum equipment, peripheral devices, vacuum components and materials for the display, solar cell, semiconductor, electronics.

Innovative plasma-based solutions for ashing, descum, surface preparation, isotropic etch, photoresist curing and charge erase that are used in the fabrication of integrated circuits.

Plasma ashing systems and parts

Manufacturer of plasma systems