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Track Systems

A track system, in the context of semiconductor fabrication, refers to a piece of equipment used to process wafers in a manufacturing environment. The track system typically consists of a series of stations, or modules, that perform specific operations on the wafers as they move through the system. These operations can include cleaning, drying, developing, etching, and other processes necessary for the production of integrated circuits (ICs) on the wafers. The track system is designed to provide a controlled environment for the wafers, ensuring that they are handled and processed consistently and with high accuracy. The use of a track system helps to improve the overall efficiency of the wafer fabrication process and increase the yield of good quality ICs. There are several current trends in track systems for semiconductor fabrication: Automation and Integration: The trend is towards more automated and integrated track systems that can perform multiple operations in a single module, thereby reducing the number of transfer steps required and improving the efficiency of the process. Miniaturization: With the increasing demand for smaller and more compact electronics, there is a trend towards miniaturizing track systems to handle smaller wafers and accommodate the finer feature sizes and tighter process control requirements of advanced technology nodes. Cost reduction: To remain competitive, manufacturers are focused on reducing the cost of track systems by using more cost-effective materials and simplifying the design. Process flexibility: With the increasing diversity of applications and the need for faster time-to-market, there is a trend towards track systems that can support a wider range of processes and be quickly reconfigured for different products. Environmental sustainability: The industry is looking for ways to reduce the environmental impact of semiconductor fabrication, including the use of more energy-efficient track systems and reducing the use of hazardous chemicals. These trends are driving innovation and improvements in track system technology, leading to better performance and higher productivity in semiconductor fabrication.

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KCTech Co., Ltd

, KR Manufacturer

CMP (Chemical Mechanical Polishing), Wet Cleaning Systems. Display Equipment: Wet Station, APP (Atmospheric Pressure Plasma Cleaner), CO₂Cleaner, Coater & Track System. CMP Slurry and nano dispersion solution

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Scientific Value Solutions Corporation

, KR Manufacturer

Coaters, Developers, Scrubbers, TSV Cu and Au plating equipment

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IFS SERVICES

, US Distributor, Service Company

Refurbishment, servicing, and sales of semiconductor CMP, Cleaning, Chemical Distribution, and Litho Track systems, we handle all of your requirements for OnTrak®, SVG®, IPEC® (IPEC-Westech), Speedfam and AMAT: Mirra®, Mirra Mesa®, MirraTrak® systems.

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EV Group, EVG

, AT Manufacturer

Systems for lithography and nanoimprint lithography, wafer bonding, metrology

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Screen SPE

, JP Manufacturer

Development and production of advanced products for cleaning, resist coating, developing, annealing and other surface processing systems, as well as products for the new 200 mm and 300mm wafer market.

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