Vertical Furnace
Our flagship product. A broad lineup that ranges from experimental applications up to mass production with excellent temperature distribution and atmosphere control.
Applications : Semiconductor, SiC Power Semiconductor, MEMS, VCSEL, PV (Photovoltaic), FPD
VF-5900 Vertical Furnace for 300-mm Wafers
VF-5900 Vertical Furnace for 300-mm Wafers
VF-5700 Vertical Furnace for 300-mm Wafers
VF-5700 Vertical Furnace for 300-mm Wafers
VF-5300 Stocker Type Vertical Furnace for Mass Production
VF-5300 Stocker Type Vertical Furnace for Mass Production
VF-5100 Turn Table Type Vertical Furnace for Mass Production
VF-5100 Turn Table Type Vertical Furnace for Mass Production
VF-3000 Low-Cost Mini Batch Vertical Furnace
VF-3000 Low-Cost Mini Batch Vertical Furnace
VF-1000 Vertical Furnace for Small Production and R&D
VF-1000 Vertical Furnace for Small Production and R&D
Horizontal Furnace
Capable of vertically stacking up to 4 horizontal processing tubes. A general-purpose system that can utilize the installation area effectively.
Applications : Semiconductor, PV (Photovoltaic)
Model 200 Series Horizontal Furnaces for Mass Production and Experiments
Model 200 Series Horizontal Furnaces for Mass Production and Experiments
Model 206A Horizontal Furnace for PV Production
Model 206A Horizontal Furnace for PV Production
Lamp Annealing System
A single wafer system that enables excellent in-plane temperature uniformity. Automatic or manual finger selection is possible.
Applications : Semiconductor, SiC Power Semiconductor
RLA-3100 Lamp Annealing System for Rapid Thermal Processing
RLA-3100 Lamp Annealing System for Rapid Thermal Processing
RLA-1200 Lamp Annealing System for Rapid Thermal Processing
RLA-1200 Lamp Annealing System for Rapid Thermal Processing
Clean Oven Systems
An optimal convection heating system for polyimide post-processing (back end process) and resist curing.
Applications : Semiconductor, FPD
SO2-12-F Heated-air Circulating Type Clean Oven for 300-mm Wafers
SO2-12-F Heated-air Circulating Type Clean Oven for 300-mm Wafers
CLH Series High-Temperature Clean Ovens
CLH Series High-Temperature Clean Ovens
Large Bore Vertical Furnace
A large bore vertical furnace for semiconductors. Super clean processing for FPD applications is possible.
Applications : PV (Photovoltaic), FPD
VFS-4000 Large Bore Vertical Furnace
VFS-4000 Large Bore Vertical Furnace
SiC Power Semiconductor Equipment
A system specially designed for SiC power semiconductor heat treatment.
Applications : Semiconductor, SiC Power Semiconductor
VF-3000H Activation Annealing Furnace
VF-3000H Activation Annealing Furnace
VF-3000H Vertical Furnace for Gate Insulating Film Formation
VF-3000H Vertical Furnace for Gate Insulating Film Formation
RLA-3100-V Lamp Annealing System for Contact Annealing
RLA-3100-V Lamp Annealing System for Contact Annealing
