Vertical Furnace
Our flagship product. A broad lineup that ranges from experimental applications up to mass production with excellent temperature distribution and atmosphere control.
Applications : Semiconductor, SiC Power Semiconductor, MEMS, VCSEL, PV (Photovoltaic), FPD

VF-5900 Vertical Furnace for 300-mm Wafers

VF-5900 Vertical Furnace for 300-mm Wafers

VF-5700 Vertical Furnace for 300-mm Wafers

VF-5700 Vertical Furnace for 300-mm Wafers

VF-5300 Stocker Type Vertical Furnace for Mass Production

VF-5300 Stocker Type Vertical Furnace for Mass Production

VF-5100 Turn Table Type Vertical Furnace for Mass Production

VF-5100 Turn Table Type Vertical Furnace for Mass Production

VF-3000 Low-Cost Mini Batch Vertical Furnace

VF-3000 Low-Cost Mini Batch Vertical Furnace

VF-1000 Vertical Furnace for Small Production and R&D

VF-1000 Vertical Furnace for Small Production and R&D

Horizontal Furnace
Capable of vertically stacking up to 4 horizontal processing tubes. A general-purpose system that can utilize the installation area effectively.
Applications : Semiconductor, PV (Photovoltaic)

Model 200 Series Horizontal Furnaces for Mass Production and Experiments

Model 200 Series Horizontal Furnaces for Mass Production and Experiments

Model 206A Horizontal Furnace for PV Production

Model 206A Horizontal Furnace for PV Production

Lamp Annealing System
A single wafer system that enables excellent in-plane temperature uniformity. Automatic or manual finger selection is possible.
Applications : Semiconductor, SiC Power Semiconductor

RLA-3100 Lamp Annealing System for Rapid Thermal Processing

RLA-3100 Lamp Annealing System for Rapid Thermal Processing

RLA-1200 Lamp Annealing System for Rapid Thermal Processing

RLA-1200 Lamp Annealing System for Rapid Thermal Processing

Clean Oven Systems
An optimal convection heating system for polyimide post-processing (back end process) and resist curing.
Applications : Semiconductor, FPD

SO2-12-F Heated-air Circulating Type Clean Oven for 300-mm Wafers

SO2-12-F Heated-air Circulating Type Clean Oven for 300-mm Wafers

CLH Series High-Temperature Clean Ovens

CLH Series High-Temperature Clean Ovens

Large Bore Vertical Furnace
A large bore vertical furnace for semiconductors. Super clean processing for FPD applications is possible.
Applications : PV (Photovoltaic), FPD

VFS-4000 Large Bore Vertical Furnace

VFS-4000 Large Bore Vertical Furnace

SiC Power Semiconductor Equipment
A system specially designed for SiC power semiconductor heat treatment.
Applications : Semiconductor, SiC Power Semiconductor

VF-3000H Activation Annealing Furnace

VF-3000H Activation Annealing Furnace

VF-3000H Vertical Furnace for Gate Insulating Film Formation

VF-3000H Vertical Furnace for Gate Insulating Film Formation

RLA-3100-V Lamp Annealing System for Contact Annealing

RLA-3100-V Lamp Annealing System for Contact Annealing

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