Oxidation Equipment

Kook Je Electric Korea Co., Ltd. manufactures and sells equipment used for semiconductor and liquid crystal display (LCD) production such as vertical diffusion and chemical vapor deposition (CVD) systems.

Thermal Process Equipment: CVD, Diffusion, Oxidation, Annealing.

Diffusion furnaces for specific technology requirements, whether it be LED, MEMS, PV, Nano or Semiconductor.

Laboratory and industrial furnaces and ovens.

Production equipment and turnkey solutions for PV, semiconductor and microelectronics. Diffusion, oxidation, annealing, CVD equipment. Furnaces for advanced packaging.

Front End fabrication equipment and vacuum equipment. Etch, CVD, PVD equipment.

Development and production of ALD and CVD reactors, lithography equipment, diffusion furnaces.

Manufacturer of batch horizontal and vertical diffusion, PECVD and LPCVD furnaces for the semiconductor and photovoltaic industries.