ALD

Technologies for ALD, CVD, ETCHER, and CLEANING semiconductor equipment using Helicon plasma.

Thermal LPCVD, Plasma Treatment System, Thermal ALD System, Dry Cleaning System

PECVD, PVD and ALD thin film deposition equipment

Monocrystalline growing furnaces for SiC, InP, GaP, GaAs, CDZ, InSb. Furnace for poly- GaAs, CdTe. Diffusion furnaces. Vacuum Equipment. Wet Process Equipment.

Levitor single wafer Rapid Thermal Processing (RTP) system. Levitrack Atomic Layer Deposition system (ALD)

Production and sales of microfabrication equipment in the field of semiconductor and MEMS.

Sputter, E-Beam, Thermal Evaporator, ALD, PEALD, RIE, PECVD, and LPCVD in manual, Semi-Automated or Fully Automated Solutions.

RTP and DLI CVD / DLI-ALD systems

Atomic layer deposition (ALD) equipment. Heating type (T-ALD) atomic layer deposition system, Powder type (P-ALD), Plasma enhanced (PEALD) atomic layer deposition system, Electric field enhanced plasma enhanced atomic layer deposition system.

Advanced thin film deposition and etch equipment: Atomic Layer Deposition (ALD) and Reactive Ion Etch (RIE) technologies.

Deposition: PECVD System, LSCVD® System, ALD System. Etching: Reactive Ion Etching System, ICP Etching System, Si Deep Reactive Ion Etching System, XeF2 Etching System. Surface Treatment: Aqua Plasma® Cleaner, Plasma Cleaner, UV Ozone Cleaner

Heaters, ALD system, hot plate, bake unit, gas supply unit, sensors,

Thin film deposition systems: pulsed laser deposition (PLD) systems, electron beam evaporators, thermal evaporators, reactive sputtering tool, hot filament chemical vapor deposition (HFCVD) systems, and thermal chemical vapor deposition (TCVD).

ALD, PECVD and cleaning equipment for semiconductor industry. PV production equipment for annealing, thin film deposition, heating and cooling.

Crystal film growth systems for a wide variety of materials. Systems : MOCVD,CVD, HVPE and ALD

ALD equipment, CVD equipment, canisters with precursors for ALD/CVD

Plasma etching, PECVD, ALD equipment, ellipsometry and reflectometry for thin films, metrology equipment for photovoltaics.

ALD equipment

Thin film equipment, technology and materials.

Chemical vapor deposition systems, gas & liquid delivery cabinets, gas panels, and related gas abatement systems.