Atmospheric Pressure CVD

Manufacture Furnaces. Refurbishment and relocation of diffusion furnaces and RTP equipment. Spare parts

PECVD, PVD and ALD thin film deposition equipment

Sputter, E-Beam, Thermal Evaporator, ALD, PEALD, RIE, PECVD, and LPCVD in manual, Semi-Automated or Fully Automated Solutions.

Multi-wafer Epitaxy reactor development. Custom Tailored Equipment Solutions and Design Services

Semiconductor and LCD equipment manufacturers in the field of CVD (LPCVD, PECVD, MOCVD), ALD Etcher

Wafer cleaning system, wafer etching system, Spin dryer, Wafer scrubber, Spray developer, Spray Echer, IPA Vapor dryer, Mask cleaner.

Thin film deposition and ion milling equipment

NEMS develops plasma technologies and provides plasma surface treatment solutions, including vacuum and atmospheric plasma machines. NEMS plasma machines can be used for surface cleaning surface etching and surface modification

Vacuum pumps & components, Thin film forming equipment, Hard film forming equipment, Plasma processing equipment, Soldering equipment, Vacuum heat treatment equipment, Optical inspection equipment

Deposition: PECVD System, LSCVD® System, ALD System. Etching: Reactive Ion Etching System, ICP Etching System, Si Deep Reactive Ion Etching System, XeF2 Etching System. Surface Treatment: Aqua Plasma® Cleaner, Plasma Cleaner, UV Ozone Cleaner

Precise surface processing equipment based on advanced ion beam and plasma technologies. The systems are applicable for coating, etching, and cleaning processes, especially for the MEMS, microelectronics, and precision optics industries.

CVD diamond and thin diamond coatings, conductive diamond electrodes, CVD diamond equipment.

ALD, PECVD and cleaning equipment for semiconductor industry. PV production equipment for annealing, thin film deposition, heating and cooling.

Chemical vapor deposition systems, gas & liquid delivery cabinets, gas panels, and related gas abatement systems.

Etch, evaporation, sputter and PECVD process systems for wafer processing and advanced packaging

CVD systems manufacturer

Vacuum equipment, peripheral devices, vacuum components and materials for the display, solar cell, semiconductor, electronics.

Diffusion and CVD process equipment

Deposition systems for epitaxial growth of SiC and GaN by Chemical Vapor Deposition (CVD) and crystal growth systems for SiC.

MOCVD epitaxial reactor manufacturer and technology provider.