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Box Coaters

Box coaters are a type of thin film deposition equipment used in semiconductor manufacturing to deposit thin films of materials onto semiconductor wafers or other substrates. Box coaters are often used to deposit dielectric films, such as silicon dioxide or silicon nitride, which are used as insulators or passivation layers in semiconductor devices. Box coaters use a process known as chemical vapor deposition (CVD) to deposit thin films onto the surface of the substrate. In a typical box coater, the substrate is placed inside a sealed chamber, which is then filled with a gas mixture containing the precursor materials for the film to be deposited. The gas mixture is then heated to a high temperature, causing a chemical reaction to occur and depositing the desired material onto the substrate. Box coaters are so named because they are often shaped like boxes, with the substrate placed inside and the precursor gases injected into the chamber through one or more ports. The box shape of the chamber helps to ensure that the gases are evenly distributed over the surface of the substrate, resulting in a uniform and high-quality film deposition. Box coaters are commonly used in the production of microelectronic devices, such as integrated circuits, transistors, and other semiconductor components. They are often used in combination with other types of thin film deposition equipment, such as sputtering systems and plasma-enhanced CVD systems, to achieve specific material properties and film thicknesses required for a particular application.

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V3 Corporation Ltd

, RU Distributor

Wet process stations, Resist processing equipment, Dicing equipment, PCB processing equipment

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Kanamex Co., Ltd.

, JP Manufacturer, Custom Manufacturer

Photolithography-related wet processing process equipment used in semiconductor front-end processes, FPDs, MEMS, etc.

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Automatic Research GmbH

, DE Manufacturer

Equipment for printing electronics and thin functional films research. Semiconductor measurement and characterization equipment.

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Structured Materials Industries, Inc

, US Manufacturer

Crystal film growth systems for a wide variety of materials. Systems : MOCVD,CVD, HVPE and ALD

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Laurell Technologies Corporation

, US Manufacturer

Spin coaters, spin processors ans wet stations.

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KYKY TECHNOLOGY CO., LTD

, CN Manufacturer

Vacuum equipment and components, helium leak detectors, SEM.

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Angstrom Engineering

, CA Custom Manufacturer

Manufacturer of PVD and CVD systems and coated substrates.

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