Low Pressure CVD

Thermal LPCVD, Plasma Treatment System, Thermal ALD System, Dry Cleaning System

Manufacture Furnaces. Refurbishment and relocation of diffusion furnaces and RTP equipment. Spare parts

OLED Display Manufacturing Equipment, Thin-Film Photovoltaic Cell Manufacturing Equipment, Vacuum Process Equipment

PECVD, PVD and ALD thin film deposition equipment

Sputter, E-Beam, Thermal Evaporator, ALD, PEALD, RIE, PECVD, and LPCVD in manual, Semi-Automated or Fully Automated Solutions.

Semiconductor and LCD equipment manufacturers in the field of CVD (LPCVD, PECVD, MOCVD), ALD Etcher

Wafer cleaning system, wafer etching system, Spin dryer, Wafer scrubber, Spray developer, Spray Echer, IPA Vapor dryer, Mask cleaner.

Kook Je Electric Korea Co., Ltd. manufactures and sells equipment used for semiconductor and liquid crystal display (LCD) production such as vertical diffusion and chemical vapor deposition (CVD) systems.

Vacuum pumps & components, Thin film forming equipment, Hard film forming equipment, Plasma processing equipment, Soldering equipment, Vacuum heat treatment equipment, Optical inspection equipment

Deposition: PECVD System, LSCVD® System, ALD System. Etching: Reactive Ion Etching System, ICP Etching System, Si Deep Reactive Ion Etching System, XeF2 Etching System. Surface Treatment: Aqua Plasma® Cleaner, Plasma Cleaner, UV Ozone Cleaner

PECVD, LPCVD and dry cleaning equipment for semiconductor. Deep UV LED Epitaxial growth equipment.

Precise surface processing equipment based on advanced ion beam and plasma technologies. The systems are applicable for coating, etching, and cleaning processes, especially for the MEMS, microelectronics, and precision optics industries.

PECVD Tool, MW Plasma CVD system for diamond and graphene based films, magnetron sputtering system and cathode. Diamond substrates and thin films.

Crystal film growth systems for a wide variety of materials. Systems : MOCVD,CVD, HVPE and ALD

Production equipment and turnkey solutions for PV, semiconductor and microelectronics. Diffusion, oxidation, annealing, CVD equipment. Furnaces for advanced packaging.

Chemical vapor deposition systems, gas & liquid delivery cabinets, gas panels, and related gas abatement systems.

Etch, evaporation, sputter and PECVD process systems for wafer processing and advanced packaging

CVD systems manufacturer

Diffusion and CVD process equipment

Deposition systems for epitaxial growth of SiC and GaN by Chemical Vapor Deposition (CVD) and crystal growth systems for SiC.