Sputtering Equipment

OLED Sputter Production

EVAPORATION SOURCE (Point Source, Linear Source) and VACUUM SYSTEM (OLED System, Sputtering System)

Sputtering System, OLED System, Solar Module System, AMHS, AS/RS, 3D Printer, Converting Machine

We design and manufacture advanced thin film deposition systems for Molecular Beam Epitaxy (MBE), UHV Magnetron Sputtering and Pulsed Laser Deposition.

Vacuum plasma equipment, Physical and thermal equipment,

Customized systems for Thin Film PVD and Etch. Small R&D/pilot project systems, large production systems utilizing processes such as Ion Beam Etching, Sputtering, Electron Beam Evaporation and Thermal Evaporation fiber-optic coating and more.

Sputter, E-Beam, Thermal Evaporator, ALD, PEALD, RIE, PECVD, and LPCVD in manual, Semi-Automated or Fully Automated Solutions.

Thin film equipment and solutions for the vacuum coating industry. Magnetron sputtering sources and plasma power supplies. Targets and backing plates, target bonding service.

Thin film deposition and ion milling equipment

Machines, plants and systems in the area of vacuum coating technology, surface processing, wet-chemical as well as thermal processing technology.

Vacuum pumps & components, Thin film forming equipment, Hard film forming equipment, Plasma processing equipment, Soldering equipment, Vacuum heat treatment equipment, Optical inspection equipment

Equipment for flat-panel displays, semiconductors and optical film sputtering equipment, and of vacuum equipment and laser equipment.

PECVD Tool, MW Plasma CVD system for diamond and graphene based films, magnetron sputtering system and cathode. Diamond substrates and thin films.

Thin film deposition systems: pulsed laser deposition (PLD) systems, electron beam evaporators, thermal evaporators, reactive sputtering tool, hot filament chemical vapor deposition (HFCVD) systems, and thermal chemical vapor deposition (TCVD).

Modular Thin Film Deposition Systems and Components.

Sputtering, Etching, Annealing and Bonding Equipment.

Microwave and plasma technology. Microwave generators, plasma systems and components, magnetrons, waveguide components.

Vacuum thin film coating equipment

Physical Vapour Deposition (PVD) and Vacuum Coating Systems

Manufacturer of RTP tool. Distrubutor of sputter, ahser, etch and metrology systems.