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Subatomospheric CVD

Recently, subatmospheric pressure deposition (SACVD) has been widely used; fast thermal CVD (RTCVD) and atomic layer deposition (ALD or ALCVD). Atomic layer deposition is a sequence of self-limiting surface reactions at low temperature leading to the deposition of monolayer films. Within the temperature window, the growth of such films is completely controlled by the substrate surface. Temperatures during atomic deposition of layers are less than 400ºС. In this case, pulsed supply of reagents at reduced pressure is used. The cycle duration is 10–200 ms, and the deposition rate is 0.1–0.5 nm/min. The growth rate of the material is directly proportional to the number of reaction cycles, and not the intensity of consumption of reagents or growth time, therefore, the films are grown layer by layer with monatomic precision. Currently, equipment for ALCVD is already being used, which makes it possible to obtain films of dielectrics, including multilayer oxides, as well as transparent conductors and semiconductors, nitrides, fluorides, AIIBVI compounds, and other materials. In addition, processes for the deposition of metallic films from tantalum and copper are being developed.

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LEAD Engineering Co., Ltd

, KR Manufacturer, Service Company

Manufacture Furnaces. Refurbishment and relocation of diffusion furnaces and RTP equipment. Spare parts

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JUSUNG Engineering Co., Ltd.

, KR Manufacturer

Semiconductor and LCD equipment manufacturers in the field of CVD (LPCVD, PECVD, MOCVD), ALD Etcher

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CVD Equipment Corporation

, US Manufacturer

Chemical vapor deposition systems, gas & liquid delivery cabinets, gas panels, and related gas abatement systems.

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Shenyang Piotech Co., Ltd

, CN Manufacturer

CVD systems manufacturer

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Sigm Plus

, RU Manufacturer, Distributor, Service Company, Manufacturers' Rep

Wide range of epitaxial heterostructures grown by MOCVD (or MOVPE)

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Elettrorava SpA

, IT Manufacturer

Manufacturer of thin film deposition systems.

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Angstrom Engineering

, CA Custom Manufacturer

Manufacturer of PVD and CVD systems and coated substrates.

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