Wafer Temporary Bonder

mask aligner and photolithography specialists providing custom-engineered contact/proximity mask aligners.

Virtual clean room environment for advanced prototyping and pilot-line production. Spin Coaters, Bake Plates, Spin Developers/Clean, Temporary Bond & Debond.

Mobile Electrostatic Carrier Platform for Temporary Bonding

Production and sales of microfabrication equipment in the field of semiconductor and MEMS.

Semiconductor and FPD manufacturing equipment. Cleanroom transfer robotics. UV irradiation systems. Precision molds and dies.

Thermal wafer test technology. Thermal Chucks. Thermal Debonding Machines. Warpage Adjustment Tools.

"Lab-to-fab" range of vacuum curing, monolayer coating, wafer and panel bonding and plasma cleaning systems.

Etch protective coatings. Antireflective coatings, multilayer systems, EUV underlayers for lithography. Bonding, de-bonding and other materials and equipment for wafer level packaging.

Systems for lithography and nanoimprint lithography, wafer bonding, metrology