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Spray Systems

Wafer spray systems are used in the semiconductor industry to apply liquids, such as photoresists and etchants, onto the surface of a wafer. The spray system typically consists of a pump, a fluid delivery system, a spray nozzle, and control systems for flow rate and uniformity. The goal is to apply a uniform and controlled amount of liquid onto the wafer surface for further processing. The type of spray system used can vary depending on the specific requirements of the process, such as the viscosity of the liquid and the size of the wafer. Some commonly used wafer spray systems include spin coating, puddle coating, and spray coating. The Batch Wafer Spray system is designed to safely and efficiently perform wet chemical cleaning and etching processes in a fully enclosed environment. With its fully automated process, from chemical storage to final rinsing and drying, repeatable results are achieved with uniformities even below 1%. This system can be used for a range of applications, from mass production to research and development and prototyping. The chemicals are stored in a closed compartment and heated/cooled before being sprayed into a closed process chamber using a pump and filter. The wafers rotate during the chemical spray to ensure uniformity, and the chemicals can either be re-circulated or used just once. The process chamber can accommodate one carrier with 25 wafers or two carriers with up to 50 wafers, making it a cost-effective solution compared to a wet bench with a reduction in relevant cost of ownership by 80%. Applications of Batch Wafer Spray include metal etching, cleaning, polymer removal, post-ash clean, resist stripping (SicOzone TM, SPM), and combined wet processes (dry in, dry out).

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Sono-Tek Corporation

, US Manufacturer, Custom Manufacturer

Ultrasonic coating solutions for MEMS/ Semiconductor, Protective Films for Dicing, Polyimide & Photoresist Coating, EMI Shielding Spray Coatings, Flip Chip Fluxing

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CSVG a.s

, CZ Manufacturer, Custom Manufacturer

Manufacturer of semiconductor equipment. Complex solution of washing, etching, drying, including chemical distribution system, heating of DI water and all other chemical solutions.

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