At Intlvac Thin Film, we design, engineer and manufacture a wide variety of customized systems for Thin Film PVD and Etch. Our product line ranges from small R&D/pilot project systems to large production systems utilizing processes such as Ion Beam Etching, Sputtering, Electron Beam Evaporation and Thermal Evaporation fiber-optic coating and more.
INTLVAC SYSTEMS
NANOCHROME THIN FILM DEPOSITION
The NanochromeTM suite of systems are highly configurable and can be outfitted with a mix of Magnetron Sputtering and Thermal and Electron Beam Evaporation. They are typically used for Precision Optics, Electronics and MEMS / NEMS applications.
NANOQUEST ION BEAM ETCH
The Nanoquest is built around a direct water cooled rotating substrate. It is typically used for Ion Beam Sputtering and Etching which makes it ideal for MEMS / NEMS and Precision Optics applications.
NANOQUEST ION BEAM SPUTTER DEPOSITION
Ion Beam Sputter Deposition (IBSD) is a physical vapor deposition method which utilizes a remote broad ion/plasma beam source to bombard a grounded sputter target.
INDIUM DEPOSITION
The Nanochrome TM Indium Deposition System is designed to thermally evaporate high volumes of solder contact metals materials such as indium. Our geometry ensures a very flat and uniform deposition front for superior "lift-off" capability.
ELECTRA UV SPUTTERING
The Electra UV Sputtering System is the ideal thin film deposition system for prototyping and R&D. The Electra is fully customizable offering rotation, heating or cooling with optional bias during film growth.
AEGIS DIAMOND LIKE CARBON
Intlvac's DLC is a fully automated PECVD platform for DLC, Infrared Anti-reflective coating and other PECVD applications where chemical and wear resistance are required.
PLEIADESTM CLUSTER SYSTEM
The PleiadesTM is a cluster system designed to combine multiple Nanoquest and Nanochrome chambers. It offers a large range of applications and the possibility to combine different deposition technologies within separate chambers.
MIDASTM FIBER METALIZATION
The MIDASTM Metalization System is designed to produce a single or multi-layer symmetrical metal coating on ends, mid spans, or windows of optical fibers for use in a hermetically sealed opto-electric package.
TVAC SPACE SIMULATION
Intlvac’s Thermal Vacuum System is a versatile space simulation system, with a large vacuum chamber designed to provide an extensive environmental test complex to simulate outer space and varying thermal conditions.
INTLVAC THIN FILM COATING SERVICES
Decades of designing and building thin film coating and etching tools has enabled Intlvac to develop in-house systems for multiple processes. These include methods such as E-Beam and Thermal Evaporation, DC Magnetron Sputtering, and Plasma-Assisted Reactive Sputtering. Using these techniques, we are able to offer coating services on a wide range of substrate materials and shapes. Unique geometries are no problem as Intlvac can design and create tooling in our machine shop.
IN-HOUSE COATING SERVICES
GOLD & PLATINUM COATING
Intlvac is among world leaders in gold coatings and deposition. Gold is not only beautiful, it is very versatile and we have developed some unique ways of depositing it.
ANTI-REFLECTION (AR)
Intlvac can provide AR coatings for a diverse range of substrates and applications for the VIS, NIR, SWIR, and MWIR spectral regions. All of our coatings are non-radioactive.
OPTICAL FILTERS
Custom optical filters are available for applications such as bandpass filters, long wave pass (LWP) filters, short wave pass (SWP) filters, neutral density filters and more.
DIELECTRIC MIRRORS
High Reflection (HR) Dielectric coatings can be produced for a diverse range of substrates for the VIS, NIR, SWIR, and MWIR spectral regions.
TRANSPARENT CONDUCTIVE COATING
Intlvac produces transparent conductive coatings using aluminum zinc oxide (AZO). Different performances are also standard as trade-offs between resistivity and transmission.
DIAMOND LIKE CARBON
DLC coating acts as a single-layer anti-reflection coating for high index substrates and it provides wear & chemical resistance for optical elements used in harsh environments.
FIBER METALIZATION
Optical fibers can be metalized with single or multi-layer symmetrical coating on ends, mid spans or windows for use in hermetically sealed opto-electronic packages.
INDIUM SOLDER BUMP BONDING
Intlvac's Icarus system geometry ensures a very flat and uniform deposition front for superior 'lift-off' capability. From pushing the 'go' button to pulling out a finished wafer with 2u of spit-free coating takes less than 90 minutes.
CUSTOMIZED COATINGS
Intlvac can provide coatings customized to a wide variety of applications and we are not restricted to the field of optics. We also have capability to coat substrates with unique geometries.
