Brumley South, Inc is the “The Source” for Premier Refurbished KLA-Tencor, ADE Inspection Equipment and many other OEM tools and parts. ISO-9001 Certified.

With a large Equipment and Parts inventory and a dedicated Class 10 Cleanroom, we provide the complete solution; from a fully refurbished system meeting original specifications, to installation to training worldwide, to after-sales service and spare parts support.



We specialize in producing NIST Traceable and Quick Check PSL Calibration Standards for KLA-Tencor Surfscan,  Candela, Horiba and other Laser based Scanners.

Brumley South also introduces the In-House ability to produce SiO2 Calibration Standards. Certified, NIST Traceable, size standard deposited on a prime silicon wafer or substrate of your choice,  at a specific size peak with narrow size distribution. Full, Circle, Half  or Custom Design across the surface.  

Calibration Standards


Brumley South offers Semiconductor Parts-Spares, Exchanges, Purchase, Repair.

KLA-Tencor Surfscan / ADE / Nanometrics Upgrades-Lasers-Robots in Stock.


We offer KLA-Tencor/ADE and More World Class Circuit Board Repairs  with Exchange Services.


Tencor Surfscan PCB Repair 6100, 6200, 6220, 6400, 6420.

Semiconductor Parts  


What Else Can We Do For You?

Argon Ion Repair

Argon Ion Laser Repair & Refurbishment: We have the Same OEM Version lasers and another Second Source Laser to best fit your Budget!   
Semiconductor Field Service: We are proud to announce that Brumley South, Inc. is now offering Field Service for your wafer inspection equipment.

Preventative Maintenance and Calibration: Brumley South will tailor your Preventative Maintenance and Calibration (PM & Cal) to meet your specific tool requirements.

Particle Deposition Systems  Make your own Non-NIST and NIST Traceable Standards In-House!

Nanometrics Service, Refurbishment & Upgrades: We design enhanced upgrades no one else can offer. NIST calibration with Certification Certificate, Hot Swap, Rentals and Loaner systems.