Founded in 1999, Advanced Micromachining Tools GmbH (AMMT) provides solutions and tools in the field of silicon micromachining. We are supplier of tools, process control equipment for wet-chemical etching of silicon, possibly one of the most important fabrication processes of bulk micromachining. In our development team, MEMS engineers, mechanical engineers, electronics specialists and computer programmers combine their efforts to develop user-friendly, safe and demand-oriented systems for our clients. AMMT maintains R&D cooperations with international research institutes and universities.
WET ETCHING
Plain Wafer holders (wafer chucks), holders with optical inspection and etching baths
ELECTROCHEMICAL ETCH-STOP (ECES)
Wafer Holders with electrical contacts and dedicated potentiostats
ELECTROPLATING
Wafer Holder with front-side contacts and Electroplating Systems
POROUS SILICON ETCHING
Complete wet etching system for porous silicon formation
HYDROFLUORIC ACID VAPOR ETCHER
Sticking free and dry silicon oxide removal
FLUIDCHIP TEST-TOOL
A testing device for small bio-sensitive fluid sensing chip
SMALL SINGLE-CHIP
ETCHING SYSTEM
IRES: INFRARED
SPECTROSCOPY ETCH-STOP
