Semiconductor manufacturing is one of the most complex and resource-intensive industries, driven by the relentless pursuit of miniaturization and performance improvements.
Energy Consumption:
Energy requirements for wafer fabrication vary significantly depending on the process complexity, ranging from 200 to 1,500 kWh per wafer.
For 90-130nm technologies , energy consumption is approximately 200-400 kWh per wafer .
For advanced 3-7nm technologies , this increases to 800-1,500 kWh per wafer .
The increase in energy consumption is driven by these factors:
A higher number of process steps and lithography stages required for smaller geometries.
The adoption of EUV (Extreme Ultraviolet) lithography , which demands significantly higher power due to its complex light sources and optics.
Stricter cleanroom standards and environmental control systems needed to maintain ultra-low particle counts and precise temperature/humidity conditions.
Water Consumption:
Water usage in wafer fabrication ranges from 6 to 38 cubic meters per wafer , depending on the process technology:
For 90-130nm technologies , water consumption is around 6-12 cubic meters per wafer .
For 3-7nm technologies , it rises to 15-38 cubic meters per wafer .
The increased water demand for advanced nodes is attributed to this:
A greater number of cleaning and rinsing steps required to prevent defects caused by residual particles or contaminants.
The necessity of using ultrapure water (UPW) , which is essential for critical cleaning processes. Producing UPW itself requires substantial energy inputs for filtration, deionization, and purification processes.
As semiconductor manufacturing advances toward smaller nodes, both energy and water consumption per wafer rise sharply due to the increasing complexity of processes, the adoption of advanced technologies like EUV lithography, and the stringent requirements for cleanliness and material purity. This highlights the growing importance of sustainable practices in semiconductor fabrication to minimize resource usage while maintaining high yields and quality.
