| Electron System |
| Resolution |
| Plus A : 5nm (30kV, SE Image) |
| Plus B 5nm(SE), 8nm(BSE) |
|
| Magnification |
20x~150,000x |
| Accelerating Voltage |
1~30kV (1/5/10/15/20/30) |
| Detector |
| Plus A : SE(Secondary Electron) |
| Plus B : SE/BSE(back Scattered Electron) *Dual Detector |
|
| Electron Gun |
Pre-centered Tungsten Filament Cartridge |
|
| Stage System |
| Stage Traverse |
| X : 40mm, Y : 40mm, R : 360˚, Z : 0 to 40mm, T : -45 to 90˚ |
| 5-axis Moterized |
|
| Max. Sample Size |
80mm in Diameter x 35mm in Height |
|
| Image System |
| Automation Function |
Auto Start, Auto Focus |
| Image Format |
BMP, JPEG, PNG, TIFF |
|
| Vacuum System |
| Vacuum Mode |
| Plus A : High Vacuum |
| Plus B : High & Low Vacuum(Multi) |
|
| Vacuum Pump |
Rotary Pump / Turbo Molecular Pump (Full Automation) |
|
| Dimensions |
| Main Unit |
390(W)x380(D)x560(H)mm, 88kg |
| Controller Unit |
390(W)x325(D)x560(H)mm, 37kg |
| Rotary Pump |
400(W)x160(D)x340(H)mm, 24kg |
|
