Electron System
Plus A : 5nm (30kV, SE Image)
Plus B 5nm(SE), 8nm(BSE)
Magnification 20x~150,000x
Accelerating Voltage 1~30kV (1/5/10/15/20/30)
Plus A : SE(Secondary Electron)
Plus B : SE/BSE(back Scattered Electron) *Dual Detector
Electron Gun Pre-centered Tungsten Filament Cartridge
Stage System
Stage Traverse
X : 40mm, Y : 40mm, R : 360˚, Z : 0 to 40mm, T : -45 to 90˚
5-axis Moterized
Max. Sample Size 80mm in Diameter x 35mm in Height
Image System
Automation Function Auto Start, Auto Focus
Image Format BMP, JPEG, PNG, TIFF
Vacuum System
Vacuum Mode
Plus A : High Vacuum
Plus B : High & Low Vacuum(Multi)
Vacuum Pump Rotary Pump / Turbo Molecular Pump (Full Automation)
Main Unit 390(W)x380(D)x560(H)mm, 88kg
Controller Unit 390(W)x325(D)x560(H)mm, 37kg
Rotary Pump 400(W)x160(D)x340(H)mm, 24kg
South Korea