Obducats' nanoimprint lithography product portfolio ranges from easy-to-use semi-automated tools to fully automated tools suitable for High Volume Manufacturing, such as IPS, SoftPress, STU, Automated IPS® demolding.
We offer both automated and semi-automated coater developer tools, suitable for High Volume Manufacturing as well as R&D work, e.g. RCCT, Extended Hot Plate temperature, EBR, Multiple Chuck solutions, ECU and FFU, Temperature controlled resist and chemical lines, Inline film thickness measurement, Flood exposure – photoresist image reversal, Fully automatic module for double side coating
Obducat provides highly configurable semi-automated as well as fully automated wet processing tools for cleaning, lift-off, etching, or developing, such as Etch, Substrate cleaning.
