Wafer Processing Equipment

Dielectric Dry Etch System that applies our own specialized plasma source technology.

UV irradiator, Wafer Laminator, Tape Mounter, Plasma Cleaner. Semiconductor Factory Automation: OHT, Stocker, Bonding Automation. Precision machined equipment parts.

Water quality analysis instrument, electroplating processing equipment: rectifiers, pumps, heaters, and plasma cleaners

EUV HVM Reflectometer, EUV Accelerated Exposure Tool, Actinic Image Review System (AIRES®), EUV Pellicle Transmission Measurement System, EUV Pellicle High-Speed Mapping Tool, EUV N&K and Phase Measurement Tool, EUV Resist Outgassing Tool

Semiconductor and FPD Equip: Non-Pattern Surface Inspection System (WM series), Pattern Inspection System (Vi series), Bump Height Inspection System, TSV / Trench Depth Measurement System, Proximity Exposure System (TME series), Visual Inspection System.

Semiconductor: FOUP Cleaner, POD Cleaner, Wet Station, Chemical Delivery Supply System, Metal Lift Off, Cassette & Magazine Cleaner. Display: OLED Mask Cleaner, Glass Cleaner, Etcher & Stripper, Auto Macro Inspection, Stream-Jet Printing, Lamination M/C,

Wafer and Substrate Mounters (Manual and Semi-automatic), Table-top UV Irradiators, Expanders, CO2 Bubblers, Transformers and other process automation equipment

Single wafer processor, Wafer scrubber, hybrid wafer cleaner system

Mask/LED/LCD/OLED Laser Repair. Atmospheric SEM, AVI (Auto Visual Inspection) for OLED, TFT AOI

Plasma Technology, Electromagnetic Shield Technology, Gas Purification Technology, Automation System Technology, Precise Alignment Technology in Vacuum

LCD/OLED In-line Production System. Process equipment: 3D Lamination, Dispenser, Grinder, Bake Oven, Furnace Oven, Micro LED Dispenser.

Technologies for ALD, CVD, ETCHER, and CLEANING semiconductor equipment using Helicon plasma.

Semiconductor cleaning equipment

Poly Etcher System (Conductor Etcher System), Metal Etcher System, Oxide Etcher System (Dielectric Etcher System)

Wet Station, Ultrasonic Cleaner, Tube Cleaner and Parts Cleaner for semiconductor and FPD production parts cleaning equipment. Chemical Supply System

AI Vision Solution, AOI Solution(DISPLAY/ Secondary Battery/ Semiconductor/ Automobile, etc.), LASER Solution

CMP (Chemical Mechanical Polishing), Wet Cleaning Systems. Display Equipment: Wet Station, APP (Atmospheric Pressure Plasma Cleaner), CO₂Cleaner, Coater & Track System. CMP Slurry and nano dispersion solution

Semiconductor: Wet Etching & Cleaning Solutions RTP(Rapid Thermal Processing). Display: Thermal Process Solutions In-Line Solutions, Inspection Process Solutions. Robotics.

Laser processing equipment for semiconductor, display, PCB

Thermal LPCVD, Plasma Treatment System, Thermal ALD System, Dry Cleaning System