Metrology & Inspection Equipment

Water quality analysis instrument, electroplating processing equipment: rectifiers, pumps, heaters, and plasma cleaners

EUV HVM Reflectometer, EUV Accelerated Exposure Tool, Actinic Image Review System (AIRES®), EUV Pellicle Transmission Measurement System, EUV Pellicle High-Speed Mapping Tool, EUV N&K and Phase Measurement Tool, EUV Resist Outgassing Tool

Semiconductor and FPD Equip: Non-Pattern Surface Inspection System (WM series), Pattern Inspection System (Vi series), Bump Height Inspection System, TSV / Trench Depth Measurement System, Proximity Exposure System (TME series), Visual Inspection System.

Mask/LED/LCD/OLED Laser Repair. Atmospheric SEM, AVI (Auto Visual Inspection) for OLED, TFT AOI

AI Vision Solution, AOI Solution(DISPLAY/ Secondary Battery/ Semiconductor/ Automobile, etc.), LASER Solution

LED/OLED Equipment: Wireless logistics, Micro LED Chip AOI Inspector, Dispenser, PAD Cleaner, COG FOG AOI. Semiconductor: Mount Inspector, Wire Bonding, Die Attach, Wafer Warpage, WRS Inspector, STOCKER system, Wafer Edge, Macro Tower Lifter, STB, Rail.

Inspection Optic System, Inspection Review Optic system, Laser Repair Optic System, Wafer nano scratch inspection optic system

FPD equipment: Edge Grinder, Edge Profiler, Drilling Machine, Cover Glass Grinder, Mother Glass Grinder. OLED Inspection, Edge Inspection, Various AOI Inspection Equipment. Laser processing equipment. Semiconductor: Loader＆Unloader, FOUP Packing Machine.

SIMPL- SEM Image Metrology PLatform, Process control monitoring : Image Quality (IQ), Process control monitoring : IC-Metric, Mask Data Preparation

Laser marking, dicing and scribing equipment for wafers, wafer thickness measurement equipment, substrate defect detection machine

Semiconductor Test Systems

femtosecond optical parametric amplifiers (OPAs) and Yb-based femtosecond laser sources.

Fast, nondestructive, electrical characterization tools under production conditions, measuring parameters like minority carrier lifetime, photoconductivity and resistivity.

dimensional, materials, and chemical metrology solutions for advanced process control used in semiconductor manufacturing.

Semiconductor Manufacturing Optics, Photomask Solutions, Process Control Solutions

Maskless photo lithography equipment, Laser de-bonding equipment, inspection and sorting equipment

Semiconductor inspection equipment, Various lamps, Light source equipment

Semiconductor front end metrology equipment: optical metrology series for film thickness & properties, and optical critical dimensions; plus X-ray metrology series for film thicknesses, material properties and compositions, surface contamination.

High Voltage Pulse Instrumentation, ESD Instrumentation

advanced metrology systems and analysis software to major companies in the semiconductor, optoelectronics, data storage, display, MEMS, and optical coating industries.