Measure the Invisible to Provide Deep Process Insight
Nova offers a comprehensive suite of materials and dimensional metrology combined with advanced modeling that enables semiconductor manufacturers to gain deeper insight throughout the entire manufacturing process, increase yields, and shorten time to market.

Our Product Portfolio

Dimensional Metrology
Integrated and standalone optical platforms for critical dimension (CD) and thin films measurements

Materials Metrology
Inline XPS and XRF platforms for composition and film thickness measurements

Chemical Metrology
Reduce cost of ownership and increase yield by controlling organic and inorganic chemistry composition of electrochemical plating baths across front-end, packaging and PCB wafer-level processes.

Software Solutions
Advanced modeling solutions empowered by physical and machine learning algorithms


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