Overlay Measurement

Semiconductor and FPD Equip: Non-Pattern Surface Inspection System (WM series), Pattern Inspection System (Vi series), Bump Height Inspection System, TSV / Trench Depth Measurement System, Proximity Exposure System (TME series), Visual Inspection System.

dimensional, materials, and chemical metrology solutions for advanced process control used in semiconductor manufacturing.

Semiconductor front end metrology equipment: optical metrology series for film thickness & properties, and optical critical dimensions; plus X-ray metrology series for film thicknesses, material properties and compositions, surface contamination.

Mueller matrix measurement systems for determining the polarization properties of materials and optical components, applications ranging from birefringence mapping and polarizer testing to LCD cell gap testing and thin-film measurements.

Otsuka Electronics Co. Explores new world with spectrometer technologies and extensive analytical knowledge.

Semiconductor/MEMS metrology and inspection equipment.

Wafer loader, AOI and vision systems, mold and precision parts.

Equipment for printing electronics and thin functional films research. Semiconductor measurement and characterization equipment.

Multi-spectral imaging systems for defect inspection & metrology using IR, visible, & UV spectrums for Semiconductor, Photonics, Medical Device, MEMS, Aerospace, Defense, & Data Storage.

Non-contact, non-destructive, in-process and post-process measurement and mapping of sheet resistance and carrier mobility of semiconducting and conducting layers and thin films on semiconducting and insulation substrates

3D Interferometry Microscope for sub-nanometer to millimeter surface profiling. Precision measurement for Semiconductor, MEMS, PV cell, Surface Engineering, OLED, etc.

Wafer mapper, growth monitor, software, wafer transfer robotics.

GBS mbH develops, manufactures and distributes systems and software for industrial image processing for quality assurance and automation tasks.

High-resolution, non-contact 3D measurement systems.

Solutions of measurements with contactless surface measurement methods for the semiconductor, display, and other precision mechanics industries. NanoSystem has built up the core technology of contactless 2D and 3D measurement and inspection systems.