Shenzhen Angstrom Excellence Technology Co. Ltd was established in October 2020, is an expert of Semiconductor front end metrology equipment in R&D, manufacture and sales. AE has established a wide variety of products and solutions - optical metrology series for film thickness & properties, and optical critical dimensions; plus X-ray metrology series for film thicknesses, material properties and compositions as well as surface contaminations, matching or exceeding world best equipment performances. We have 1000m2 clean room in Shenzhen, including class 1000 equipment assembly area, class 100 & 10 laboratory.
The core R & D team of AE is strong, composed of overseas talents with rich semiconductor professional experience and domestic elites, who come from top semiconductor equipment companies in US, Japan, Europe. With the participation of more excellent R&D personnel from the China mainland, AE has formed an international scientific research team with global comprehensive R&D strength in the field of semiconductor equipment. While focusing on research and development of the core technologies independently, AE also devotes to look for opportunities of global technical cooperation and marketing development, and AE has already made several technical breakthroughs and innovations in various metrology areas.

Thin Film Metrology

Optical Thin Film Metrology
High Yield™ Series

X-ray Thin Film Metrology
Åthena Xcellence™ Series


X-ray Light Elements and Thin Film Metrology
Åthena Xcellence™ LE Series

Criticla Dimension Metrology

Optical Critical Dimension Metrology
High Yield™ Competence Series

X-ray Critical Dimension
Åthena Xcellence™ Competence Series

Material Metrology

X-ray Contaminations Metrology
Åthena Fullfillment™ Series

X-ray Diffraction Metrology
Åthena Xcellence™ D Series


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