Carl Zeiss SMT GmbH is the head of ZEISS Semiconductor Manufacturing Technology business group which encompasses the business units Lithography Optics, Laser Optics and Semiconductor Metrology Systems. With a broad portfolio of products and globally leading know-how in the areas of lithography and optical modules, the business group covers various key processes in microchip production: as a developer and manufacturer of lithography optics, for example, the Lithography Optics business unit is a technology and market leader in this sector of the semiconductor industry. The portfolio of Laser Optics includes optical components for lithography lasers and subsystems for wafer inspection systems. With its inspection, repair and metrology systems, Semiconductor Metrology Systems focuses on the photomask, one of the core components of chip fabrication.

Technologies from ZEISS SMT
What do space travel, bitcoins and smartphones have in common? They rely on semiconductor technology with nanometer-scale circuitry. With our broad product portfolio for semiconductor manufacturing, we cover the various phases of chip development and production. We are enabling the global semiconductor industry to make the next technological leap. In doing so, we are constantly coming up against the limits of what is technologically feasible – then pushing them further.

Our Product Portfolio
ZEISS Semiconductor Manufacturing Technology
An employee works on an EUV illumination system from ZEISS SMT 
Lithography Optics
With lithography optics, laser optics and other optical systems, we enable customers worldwide to expose wafers with nanometer resolution. This lays the groundwork for ever smaller, more efficient and more powerful microchips. ZEISS SMT optics and mirrors are also used in synchrotrons for basic physics research.

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Two employees in the clean room of the photomask solutions
Photomask Solutions
Error-free exposure of wafers in semiconductor production saves time and money. Thanks to our photomask solutions, defects on the photomask can be detected, analyzed and repaired – while allowing specific mask properties to be measured and optimized. This enables us to produce defect-free photomasks for microchip fabrication.

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Two employees of SMT Process Control Solutions chat in the ZEISS SMT clean room
Process Control Solutions
Rapid development, prototyping and testing of integrated circuits are essential for efficient semiconductor manufacturing operations. Our process control solutions enable sample preparation and nanometer-accurate structure and defect detection of semiconductor components. Thanks to highly efficient and fast 2D and 3D imaging processes, chip manufacturers receive all relevant information in the shortest possible time.

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