Components, Parts and Accessoires

Hermetic packages, glass-to-metal seals

IC Packaging Service, Open Cavity Packages, Test Socket, Polyimide(PI)

Interface Control Technology Module & Parts: N2 Purge Load Port System, N2 FOUP Purge System. PECVD & PCVD Module & Parts: Cassette Loader, Wafer Transfer Module, RPCVD Installation

Plasma Technology, Electromagnetic Shield Technology, Gas Purification Technology, Automation System Technology, Precise Alignment Technology in Vacuum

Abatement and Liquid Delivery System

Deep-ultraviolet (DUV) light sources. Excimer lasers using argon fluoride (ArF) or krypton fluoride (KrF) gases to generate light in the deep-ultraviolet spectrum.

THC (Temperature & Humidity Controller), Dehumidifier, CHR (Chiller)

CHILLER, HEAT EXCHANGER, SCRUBBER, TEST CHAMBER. RETAINER RINGS and OTHER PROCESSING PARTS

Dry Vacuum Pumps for Solar, Semiconductor, Display

EVAPORATION SOURCE (Point Source, Linear Source) and VACUUM SYSTEM (OLED System, Sputtering System)

Transfer Module, EFEM, Aligner, LPM, Robot, Intelligent robot

Wafer Transfer Robots, FOUP Handling Robot, Reticle / Mask Handling Robot, Load Port / Loader, Aligners, EFEM (Equipment Front End Module)

EFEM, Atmospheric Robot, Transfer Module, Vacuum Robot

ROBOTS for semiconductor industry. Automation equipment in semiconductor, LCD, OLED, LED.

Scrubbers for exhaust gases, chillers to control the processing temperature on the Fab equipment

Water filters for semiconductor and LCD production lines. Water systems for electronics

Engineering plastics, Ion exchange resins, Photoresist

Semiconductor Equipment (Memory, Logic, Flash, Burn-in-Sorter Test Handler)/ SMD Placement System/ Mask Manufacture Equipment