Heating elements and other Furnace components

Developing semiconductor equiment parts and industrial heaters.

Electrical heaters, process heaters, thermocouples, temperature sensors.

Manufacture Furnaces. Refurbishment and relocation of diffusion furnaces and RTP equipment. Spare parts

Heating tubes and elements

critical in-chamber heating and cooling devices, as well as custom-engineered thermal devices for a variety of wafer processing applications.

Manufacturer of High Purity (6N) Polycrystalline SiC parts and components, such as Wafer Carrier, Susceptor, Ring, Heater or Dummy Wafer for Semiconductor Manufacturing Systems.

Standard and Custom Heating Jackets, Silicone Heating Blankets, Flexible Heating Elements, Resistance Wiring, Heating Tapes and Cables. Applications include Etch, LPCVD, and CVD Gas Delivery and Exhaust Lines.

Wet Cleaning Systems and Chemicals, UV Ozone Cleaner, Wafer Mounter, Wafer Expander, Grip Ring, UV Curing System

Semiconductor diffusion heater and custom high temperature furnace chamber manufacturer.

DI water and Chemical heaters, chemical and solvent heaters, quartz heaters, fluoropolymer (PTFE) heaters, electric immersion heaters, heat exchangers, high-temperature filter chambers, solvent heaters, DynatronixTM power supplies, Controls.

Advanced heat treatment equipment for production of power semiconductors, (Si, SiC, GaN), organic EL (OLED), MEMS, and VCSEL, for Packaging (Fan-Out WLP/PLP, Wafer Bump, others), liquid crystal displays (LCD) and organic EL (OLED).

High temperature, high vacuum and controlled atmosphere furnaces.

Nanjing Advanced Semiconductor Technology (NAST), Co., Ltd specializes in the production of semiconductor-grade silicon material, including optimized hot zone and full-automatic process of crystal growth.

heat treatment systems for producing power semiconductors, silicon and compound semiconductors, solar batteries, organic EL (OLED), polyimide and MEMS. Our product lineup covers heat treatments from a low-temperature range to 1850°C.

Advanced carbon -based composites materials and products: MOCVD Disk, Single-Crystal Hot-Zone, Crucible,

Heaters, Heat exchangers, Titanium products, PTC heaters

Non-oxidized precision ovens and provide networking and automation solutions in the curing process. Plastic molds and replacement parts. Wafer applicator, gumming machine,uncovering and labeling machine.

Special ceramic materials, refractory metal products evaporation and plating equipment

Heaters, vaporizers.

Heaters for semiconductor and solar applications